F. J. Pantenburg

524 total citations
29 papers, 373 citations indexed

About

F. J. Pantenburg is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Radiation. According to data from OpenAlex, F. J. Pantenburg has authored 29 papers receiving a total of 373 indexed citations (citations by other indexed papers that have themselves been cited), including 23 papers in Electrical and Electronic Engineering, 14 papers in Biomedical Engineering and 9 papers in Radiation. Recurrent topics in F. J. Pantenburg's work include Advancements in Photolithography Techniques (17 papers), Advanced Surface Polishing Techniques (11 papers) and Advanced X-ray Imaging Techniques (7 papers). F. J. Pantenburg is often cited by papers focused on Advancements in Photolithography Techniques (17 papers), Advanced Surface Polishing Techniques (11 papers) and Advanced X-ray Imaging Techniques (7 papers). F. J. Pantenburg collaborates with scholars based in Germany, Italy and France. F. J. Pantenburg's co-authors include J. Mohr, Sven Achenbach, F. Pérennès, Jürgen Mohr, J. J. Mohr, Francesco De Bona, Hans Mommsen, A. Snigirev, V. Nazmov and I. Snigireva and has published in prestigious journals such as Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms and Microelectronic Engineering.

In The Last Decade

F. J. Pantenburg

29 papers receiving 342 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
F. J. Pantenburg Germany 12 250 175 141 65 36 29 373
H. Betz Germany 10 219 0.9× 103 0.6× 59 0.4× 86 1.3× 42 1.2× 29 319
H.‐L. Huber Germany 11 241 1.0× 102 0.6× 59 0.4× 89 1.4× 85 2.4× 54 423
Zhitian Shi Switzerland 12 173 0.7× 105 0.6× 108 0.8× 24 0.4× 11 0.3× 30 300
Sateesh S. Bajikar United States 7 105 0.4× 201 1.1× 59 0.4× 18 0.3× 53 1.5× 11 330
Marc Klosner United States 10 247 1.0× 179 1.0× 33 0.2× 25 0.4× 29 0.8× 14 402
B. Vratzov Germany 12 296 1.2× 401 2.3× 25 0.2× 76 1.2× 21 0.6× 19 544
Cheryl Hartfield United States 8 130 0.5× 136 0.8× 19 0.1× 55 0.8× 31 0.9× 30 304
H. Paetzelt Germany 13 207 0.8× 241 1.4× 37 0.3× 31 0.5× 52 1.4× 24 492
Dan Herr United States 10 206 0.8× 125 0.7× 25 0.2× 76 1.2× 22 0.6× 68 389
Jy Bhardwaj United Kingdom 8 315 1.3× 181 1.0× 11 0.1× 30 0.5× 29 0.8× 17 431

Countries citing papers authored by F. J. Pantenburg

Since Specialization
Citations

This map shows the geographic impact of F. J. Pantenburg's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by F. J. Pantenburg with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites F. J. Pantenburg more than expected).

Fields of papers citing papers by F. J. Pantenburg

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by F. J. Pantenburg. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by F. J. Pantenburg. The network helps show where F. J. Pantenburg may publish in the future.

Co-authorship network of co-authors of F. J. Pantenburg

This figure shows the co-authorship network connecting the top 25 collaborators of F. J. Pantenburg. A scholar is included among the top collaborators of F. J. Pantenburg based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with F. J. Pantenburg. F. J. Pantenburg is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Meyer, Pascal & F. J. Pantenburg. (2013). A Monte Carlo study of the primary absorbed energy redistribution in X-ray lithography. Microsystem Technologies. 20(10-11). 1881–1889. 2 indexed citations
2.
Kenntner, J., Thomas Grund, F. J. Pantenburg, et al.. (2012). Fabrication and characterization of analyzer gratings with high aspect ratios for phase contrast imaging using a Talbot interferometer. AIP conference proceedings. 89–93. 21 indexed citations
3.
Börner, Martin, Richard Heldele, J. J. Mohr, et al.. (2006). Research activities in the LIGA laboratory at ANKA. 1 indexed citations
4.
Achenbach, Sven, F. J. Pantenburg, & J. J. Mohr. (2003). Numerical simulation of thermal distortions in deep and ultra deep X-ray lithography. Microsystem Technologies. 9(3). 220–224. 13 indexed citations
5.
Nazmov, V., F. J. Pantenburg, J. Mohr, et al.. (2003). Kinoform X-ray lens creation in polymer materials by deep X-ray lithography. Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms. 217(3). 409–416. 32 indexed citations
6.
Nazmov, V., F. J. Pantenburg, J. Mohr, et al.. (2002). X-ray lens with kinoform refractive profile created by x-ray lithography. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 4783. 176–176. 10 indexed citations
7.
Pérennès, F., Erik Vesselli, & F. J. Pantenburg. (2002). Deep X-ray lithography at ELETTRA using a central beam-stop to enhance adhesion. Microsystem Technologies. 8(4-5). 330–334. 5 indexed citations
8.
Pérennès, F. & F. J. Pantenburg. (2001). Adhesion improvement in the deep X-ray lithography process using a central beam-stop. Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms. 174(3). 317–323. 12 indexed citations
9.
Göttert, J., H. O. Moser, F. J. Pantenburg, V. Saile, & Ralph Steininger. (2000). ANKA – a synchrotron light source for X-ray based micromachining. Microsystem Technologies. 6(3). 113–116. 5 indexed citations
10.
Bade, Klaus J., et al.. (2000). Alternative resist adhesion and electroplating layers for LIGA process. Microsystem Technologies. 6(5). 161–164. 13 indexed citations
11.
Hein, H., et al.. (2000). LIGA technology today and its industrial applications. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 4194. 44–44. 11 indexed citations
12.
Megtert, S., et al.. (1999). Preliminary results on the use of mirrors for LIGA process. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 3680. 917–917. 6 indexed citations
13.
Pantenburg, F. J., Sven Achenbach, & J. Mohr. (1998). Influence of developer temperature and resist material on the structure quality in deep x-ray lithography. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 16(6). 3547–3551. 37 indexed citations
14.
Pantenburg, F. J., et al.. (1997). Heat transport in masks for deep X-ray lithography during the irradiation process. Microelectronics Journal. 28(3). 349–355. 9 indexed citations
15.
Börner, M., Manfred Kohl, F. J. Pantenburg, et al.. (1996). Sub-micron LIGA process for movable microstructures. Microelectronic Engineering. 30(1-4). 505–508. 9 indexed citations
16.
Kohl, Manfred, et al.. (1996). Movable microstructures made by a sub-micron LIGA process. Microsystem Technologies. 2(3). 149–152. 4 indexed citations
17.
Börner, M., Manfred Kohl, F. J. Pantenburg, et al.. (1995). Movable microstructures made by a sub-micron LIGA process. Microsystem Technologies. 2(1). 149–152. 8 indexed citations
18.
Pantenburg, F. J., et al.. (1994). Adhesion problems in deep-etch x-ray lithography caused by fluorescence radiation from the plating base. Microelectronic Engineering. 23(1-4). 223–226. 20 indexed citations
19.
Pantenburg, F. J., et al.. (1992). The fundamental parameter method applied to X-ray fluorescence analysis with synchrotron radiation. Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms. 68(1-4). 125–132. 15 indexed citations
20.
Mommsen, Hans, et al.. (1990). Eine mykenische Scherbe in Spanien. Praehistorische Zeitschrift. 65(1). 1 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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