Immediate Impact
30 standout
Citing Papers
A three-terminal light emitting and detecting diode
2024 Standout
Machine tool calibration: Measurement, modeling, and compensation of machine tool errors
2023 Standout
Works of Oliver D. Patterson being referenced
In-line E-beam metrology and defect inspection: industry reflections, hybrid E-beam opportunities, recommendations and predictions
2017
In-line E-beam wafer metrology and defect inspection: the end of an era for image-based critical dimensional metrology? New life for defect inspection
2013
Author Peers
| Author | Last Decade | Papers | Cites | ||||
|---|---|---|---|---|---|---|---|
| Oliver D. Patterson | 154 | 39 | 20 | 23 | 26 | 178 | |
| Wenbin Zhang | 158 | 31 | 12 | 36 | 38 | 253 | |
| Norbert Link | 63 | 6 | 15 | 43 | 22 | 158 | |
| Carlos Fonseca | 204 | 56 | 14 | 81 | 32 | 223 | |
| Jason P. Cain | 208 | 80 | 36 | 45 | 33 | 250 | |
| Gerald Gold | 197 | 7 | 3 | 17 | 23 | 258 | |
| Monique Ercken | 169 | 31 | 13 | 74 | 41 | 182 | |
| Geng Han | 196 | 92 | 17 | 86 | 21 | 243 | |
| Andreas Roßkopf | 201 | 10 | 6 | 9 | 28 | 233 | |
| Maximilian Schmid | 170 | 3 | 9 | 35 | 33 | 209 | |
| Seung-Soo Han | 96 | 3 | 32 | 12 | 25 | 153 |
All Works
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