Immediate Impact
3 by Nobel laureates 3 from Science/Nature 53 standout
Citing Papers
Non-CO2 greenhouse gas separation using advanced porous materials
2024 Standout
Climate change and industrial F-gases: A critical and systematic review of developments, sociotechnical systems and policy options for reducing synthetic greenhouse gas emissions
2021 Standout
Works of JJ Beulens being referenced
Role of N2 addition on CF4/O2 remote plasma chemical dry etching of polycrystalline silicon
1997
Chemical dry etching of silicon nitride and silicon dioxide using CF4/O2/N2 gas mixtures
1996
Author Peers
| Author | Last Decade | Papers | Cites | |||
|---|---|---|---|---|---|---|
| JJ Beulens | 655 | 362 | 277 | 23 | 799 | |
| Yukinobu Hikosaka | 659 | 237 | 258 | 27 | 717 | |
| Sergey Zyryanov | 728 | 380 | 200 | 50 | 828 | |
| A. S. Kovalev | 642 | 275 | 135 | 37 | 715 | |
| I. S. Falconer | 423 | 437 | 297 | 48 | 739 | |
| Gilles Cunge | 732 | 294 | 316 | 29 | 892 | |
| H. Lydtin | 278 | 316 | 571 | 20 | 812 | |
| C. W. Jurgensen | 718 | 262 | 168 | 30 | 859 | |
| O. Leroy | 522 | 164 | 281 | 24 | 685 | |
| S. Komiya | 398 | 339 | 320 | 54 | 801 | |
| B. Grolleau | 679 | 188 | 403 | 28 | 820 |
All Works
Loading papers...