Immediate Impact
16 standout
Citing Papers
A concise review of the Raman spectra of carbon allotropes
2022 Standout
Conformality in atomic layer deposition: Current status overview of analysis and modelling
2019 Standout
Works of J. W. Shon being referenced
Ultrahigh Selective Etching of SiO[sub 2] Using an Amorphous Carbon Mask in Dual-Frequency Capacitively Coupled C[sub 4]F[sub 8]/CH[sub 2]F[sub 2]/O[sub 2]/Ar Plasmas
2010
Highly selective etching of silicon nitride to physical-vapor-deposited a-C mask in dual-frequency capacitively coupled CH2F2∕H2 plasmas
2009
Author Peers
| Author | Last Decade | Papers | Cites | ||||
|---|---|---|---|---|---|---|---|
| J. W. Shon | 572 | 110 | 253 | 126 | 18 | 602 | |
| Sumio Ashida | 461 | 153 | 217 | 134 | 22 | 517 | |
| Alex Paterson | 505 | 98 | 199 | 95 | 22 | 532 | |
| B. P. Aragon | 518 | 86 | 275 | 91 | 12 | 561 | |
| Ken Collins | 601 | 74 | 287 | 163 | 29 | 614 | |
| G. Sauvé | 479 | 109 | 120 | 212 | 15 | 562 | |
| Edward V. Barnat | 414 | 285 | 173 | 135 | 27 | 660 | |
| Min-Hyong Lee | 653 | 92 | 372 | 99 | 21 | 686 | |
| S. Banna | 562 | 197 | 232 | 55 | 34 | 686 | |
| Yukinobu Hikosaka | 659 | 258 | 237 | 129 | 27 | 717 | |
| C. B. Fleddermann | 388 | 129 | 93 | 46 | 33 | 514 |
All Works
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