Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

35.0k citations

3.9k papers · indexed · active since 1950

Electrical and Electronic Engineering top 5%
Materials Chemistry top 5%
Biomedical Engineering top 10%
Atomic and Molecular Physics, and Optics top 5%
Electronic, Optical and Magnetic Materials top 5%

Fields: Structural Biology (117 papers)Surfaces, Coatings and Films (436 papers)Electrical and Electronic Engineering (2.6k papers)
Topics: Semiconductor materials and devicesAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure Analysis
Top scholars: S. J. Pearton F. Ren Lorenzo Mangolini G. S. Oehrlein Jihyun Kim David B. Graves K. Jagannadham Bo Cui

In The Last Decade

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

3.7k papers receiving 33.8k citations

Peers

Replace Beilstein Journal of Nanotechnology with:

Beilstein Journal of Nanotechnology Germany

Faraday Discussions United States

Surface Review and Letters China

Philosophical Magazine B United Kingdom

The European Physical Journal Applied Physics France

Philosophical magazine. A/Philosophical magazine. A. Physics of condensed matter. Structure, defects and mechanical properties United States

The Philosophical Magazine A Journal of Theoretical Experimental and Applied Physics United States

Journal of Modern Optics China

Philosophical Magazine Letters United States

Physical Review Applied China

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena relative to Beilstein Journal of Nanotechnology Germany Beilstein Journal of Nanotechnology's profile →

Citations per field

00.5×1.5×

Beilstein Journal of Nanotechnology · 1×

×1.4 21k/15k

EEE

×0.6 14k/23k

MC

×0.7 10k/14k

BE

×1.3 9k/6k

AMPO

×0.9 6k/6k

EOMM

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Countries where authors publish in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Since Specialization

Citations

This map shows the geographic impact of research published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by papers published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena more than expected).

Fields of papers published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena.

About Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

The 3.9k papers published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena in the last decades have received a total of 35.0k indexed citations . Papers published in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena usually cover Structural Biology (117 papers), Surfaces, Coatings and Films (436 papers) and Electrical and Electronic Engineering (2.6k papers) specifically the topics of Semiconductor materials and devices (1.0k papers), Advancements in Photolithography Techniques (453 papers) and Integrated Circuits and Semiconductor Failure Analysis (376 papers). The most active scholars publishing in Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena are S. J. Pearton, F. Ren, Lorenzo Mangolini, G. S. Oehrlein, Jihyun Kim, David B. Graves, K. Jagannadham, Bo Cui, Stephanie Law and R. J. Phaneuf.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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