Tetsuya Homma

1.1k total citations
58 papers, 772 citations indexed

About

Tetsuya Homma is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Materials Chemistry. According to data from OpenAlex, Tetsuya Homma has authored 58 papers receiving a total of 772 indexed citations (citations by other indexed papers that have themselves been cited), including 44 papers in Electrical and Electronic Engineering, 19 papers in Electronic, Optical and Magnetic Materials and 10 papers in Materials Chemistry. Recurrent topics in Tetsuya Homma's work include Copper Interconnects and Reliability (19 papers), Semiconductor materials and devices (14 papers) and Plasma Diagnostics and Applications (8 papers). Tetsuya Homma is often cited by papers focused on Copper Interconnects and Reliability (19 papers), Semiconductor materials and devices (14 papers) and Plasma Diagnostics and Applications (8 papers). Tetsuya Homma collaborates with scholars based in Japan, United States and Czechia. Tetsuya Homma's co-authors include Hideo Takahashi, Ryuichi Yamaguchi, Masayuki Kakehata, Yohei Kobayashi, Hideyuki Takada, Kenji Torizuka, Takao Nagatomo, Yoshiaki Yamada, Takuya Katoh and Koichi Fujii and has published in prestigious journals such as Journal of The Electrochemical Society, Optics Letters and Optics Express.

In The Last Decade

Tetsuya Homma

52 papers receiving 752 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Tetsuya Homma Japan 15 457 254 213 205 98 58 772
Bocong Zheng China 17 755 1.7× 318 1.3× 152 0.7× 215 1.0× 229 2.3× 54 998
Yu-Long Jiang China 18 937 2.1× 420 1.7× 388 1.8× 172 0.8× 67 0.7× 101 1.2k
S. Nagai Japan 9 449 1.0× 463 1.8× 224 1.1× 225 1.1× 139 1.4× 19 894
Lars F. Voss United States 16 767 1.7× 477 1.9× 157 0.7× 181 0.9× 58 0.6× 112 1.1k
Seong Shan Yap Malaysia 14 318 0.7× 306 1.2× 63 0.3× 53 0.3× 115 1.2× 70 644
Kwon-Sang Ryu South Korea 13 368 0.8× 274 1.1× 86 0.4× 253 1.2× 38 0.4× 75 771
R. Wendt Germany 17 963 2.1× 1.1k 4.1× 149 0.7× 210 1.0× 161 1.6× 29 1.3k
Yun Cui China 13 275 0.6× 249 1.0× 163 0.8× 49 0.2× 80 0.8× 45 623
P. Mandal India 18 371 0.8× 393 1.5× 135 0.6× 344 1.7× 35 0.4× 63 916

Countries citing papers authored by Tetsuya Homma

Since Specialization
Citations

This map shows the geographic impact of Tetsuya Homma's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Tetsuya Homma with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Tetsuya Homma more than expected).

Fields of papers citing papers by Tetsuya Homma

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Tetsuya Homma. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Tetsuya Homma. The network helps show where Tetsuya Homma may publish in the future.

Co-authorship network of co-authors of Tetsuya Homma

This figure shows the co-authorship network connecting the top 25 collaborators of Tetsuya Homma. A scholar is included among the top collaborators of Tetsuya Homma based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Tetsuya Homma. Tetsuya Homma is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Homma, Tetsuya, et al.. (2020). Recycling SiC Focus Rings for Reactive Ion Etching Equipment by Insertless Diffusion Bonding using Hot Isostatic Pressing. ECS Journal of Solid State Science and Technology. 9(12). 124006–124006. 2 indexed citations
2.
Homma, Tetsuya, et al.. (2020). Improvement of Process Reproducibility and Particle Reduction for YF 3 Coating by Collision Assisted Sintering Process in Reactive Ion Etching. ECS Journal of Solid State Science and Technology. 9(6). 64008–64008. 1 indexed citations
3.
Okuno, Masayuki, et al.. (2016). Power Efficiency and Loss in Push-pull MOS-FET DC-to-RF Power Inverter for Plasma Generator. IEEJ Transactions on Industry Applications. 136(8). 511–521. 1 indexed citations
4.
5.
Kubo, Tomoaki, Masateru Minami, & Tetsuya Homma. (2008). An algorithm to visualize tool difference transitions in semiconductor fabrications. 215–218.
6.
Ito, Yasuhiro, et al.. (2007). Effect of Temperature on Photoresist Critical Dimension during Puddle Development. Japanese Journal of Applied Physics. 46(6R). 3354–3354. 1 indexed citations
7.
Homma, Tetsuya, et al.. (2007). Comparison of Flow Models for Photoresist Behavior at Contact Holes in Thermal Flow Processes. Journal of The Electrochemical Society. 154(10). H894–H894.
8.
Kobayashi, Hiroaki, et al.. (2005). Newly Developed High-Speed Rotating Disk Chemical Vapor Deposition Equipment for Poly-Si Films. Japanese Journal of Applied Physics. 44(1R). 125–125. 8 indexed citations
9.
Kobayashi, Hiroaki, et al.. (2005). High-Speed Rotating-Disk Chemical Vapor Deposition Process for In-Situ Arsenic-Doped Polycrystalline Silicon Films. Japanese Journal of Applied Physics. 44(11R). 7883–7883. 3 indexed citations
10.
11.
Arikawa, Hiroyuki, Takahito Kanie, Koichi Fujii, et al.. (2004). Optical and Color Stabilities of Paint-on Resins for Shade Modification of Restorative Resins. Dental Materials Journal. 23(2). 155–160. 22 indexed citations
12.
Arikawa, Hiroyuki, Takahito Kanie, Koichi Fujii, et al.. (2003). Optical Properties of Paint-on Resins for Shade Modification of Crown and Bridge Resins-Light Transmittance Characteristics-. Dental Materials Journal. 22(3). 272–279. 16 indexed citations
13.
Arikawa, Hiroyuki, et al.. (2002). Mechanical Properties of Light-cured Composite Resins Cured through Filters that Simulate Enamel.. Dental Materials Journal. 21(2). 147–155. 9 indexed citations
14.
Taniguchi, Yuki, et al.. (2001). Thermo-Optic Switch using Fluorinated Silicon Oxide and Organic Spin-on-Glass Films. Optical Review. 8(5). 323–325. 3 indexed citations
15.
Homma, Tetsuya, et al.. (2000). Optical Properties of Fluorinated Silicon Oxide and Organic Spin-on-Glass Films for Thin-Film Optical Waveguides. Journal of The Electrochemical Society. 147(3). 1141–1141. 11 indexed citations
16.
Homma, Tetsuya. (1996). Characteristics of SiOF Films Formed Using Tetraethylorthosilicate and Fluorotriethoxysilane at Room Temperature by Chemical Vapor Deposition. Journal of The Electrochemical Society. 143(2). 707–711. 12 indexed citations
17.
Homma, Tetsuya. (1995). Future trends for interlayer dielectric films and their formation technologies in ULSI multilevel interconnections. Materials Chemistry and Physics. 41(4). 234–239. 6 indexed citations
18.
Homma, Tetsuya, et al.. (1993). A Fully Planarized Multilevel Interconnection Technology Using Semi‐Selective Tetraethoxysilane‐Ozone Chemical Vapor Deposition at Atmospheric Pressure. Journal of The Electrochemical Society. 140(12). 3591–3599. 8 indexed citations
19.
Homma, Tetsuya, et al.. (1993). Flow Characteristics of SiOF Films in Room Temperature Chemical Vapor Deposition Utilizing Fluoro‐Trialkoxy‐Silane Group and Pure Water as Gas Sources. Journal of The Electrochemical Society. 140(12). 3599–3603. 21 indexed citations
20.
Homma, Tetsuya, et al.. (1991). Fully planarized multilevel interconnection using selective SiO2 deposition. 32(3). 315–322. 5 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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