M. Offenberg

1.1k total citations
30 papers, 799 citations indexed

About

M. Offenberg is a scholar working on Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics and Biomedical Engineering. According to data from OpenAlex, M. Offenberg has authored 30 papers receiving a total of 799 indexed citations (citations by other indexed papers that have themselves been cited), including 29 papers in Electrical and Electronic Engineering, 8 papers in Atomic and Molecular Physics, and Optics and 4 papers in Biomedical Engineering. Recurrent topics in M. Offenberg's work include Semiconductor materials and devices (21 papers), Silicon and Solar Cell Technologies (9 papers) and Thin-Film Transistor Technologies (9 papers). M. Offenberg is often cited by papers focused on Semiconductor materials and devices (21 papers), Silicon and Solar Cell Technologies (9 papers) and Thin-Film Transistor Technologies (9 papers). M. Offenberg collaborates with scholars based in Germany, United States and Spain. M. Offenberg's co-authors include M. Liehr, S. R. Kasi, C. Michael Greenlief, Edward H. Poindexter, W. L. Warren, W. Müller‐Warmuth, Gary W. Rubloff, B. Heinz, R. Meyer and B. Harbecke and has published in prestigious journals such as Physical review. B, Condensed matter, Applied Physics Letters and Journal of The Electrochemical Society.

In The Last Decade

M. Offenberg

29 papers receiving 764 citations

Author Peers

Peers are selected by citation overlap in the author's most active subfields. citations · hero ref

Author Last Decade Papers Cites
M. Offenberg 656 271 257 179 85 30 799
R. B. Marcus 834 1.3× 435 1.6× 360 1.4× 387 2.2× 71 0.8× 35 1.2k
Morio Inoue 536 0.8× 165 0.6× 252 1.0× 65 0.4× 45 0.5× 55 620
U. G�sele 791 1.2× 404 1.5× 371 1.4× 137 0.8× 59 0.7× 16 911
P. M. L. O. Scholte 361 0.6× 375 1.4× 272 1.1× 110 0.6× 74 0.9× 31 689
Akihiro Moritani 472 0.7× 245 0.9× 194 0.8× 126 0.7× 46 0.5× 58 623
A. Rosengreen 452 0.7× 165 0.6× 261 1.0× 108 0.6× 38 0.4× 8 591
Otto Leistiko 855 1.3× 337 1.2× 174 0.7× 218 1.2× 55 0.6× 43 1.0k
M. D. Moyer 1.0k 1.5× 238 0.9× 557 2.2× 90 0.5× 100 1.2× 29 1.1k
S. Reboh 359 0.5× 166 0.6× 141 0.5× 103 0.6× 73 0.9× 57 528
L. C. Kimerling 1.1k 1.6× 556 2.1× 345 1.3× 151 0.8× 114 1.3× 47 1.2k

Countries citing papers authored by M. Offenberg

Since Specialization
Citations

This map shows the geographic impact of M. Offenberg's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by M. Offenberg with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites M. Offenberg more than expected).

Fields of papers citing papers by M. Offenberg

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by M. Offenberg. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by M. Offenberg. The network helps show where M. Offenberg may publish in the future.

Co-authorship network of co-authors of M. Offenberg

This figure shows the co-authorship network connecting the top 25 collaborators of M. Offenberg. A scholar is included among the top collaborators of M. Offenberg based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with M. Offenberg. M. Offenberg is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Offenberg, M., et al.. (2005). Novel Process For A Monolithic Integrated Accelerometer. Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. 1. 589–592. 31 indexed citations
2.
Offenberg, M., et al.. (1999). Influence of anneals in oxygen ambient on stress of thick polysilicon layers. Sensors and Actuators A Physical. 76(1-3). 335–342. 6 indexed citations
3.
Offenberg, M., et al.. (1999). Bosch deep silicon etching: improving uniformity and etch rate for advanced MEMS applications. 211–216. 105 indexed citations
4.
Offenberg, M., et al.. (1997). Texture and stress profile in thick polysilicon films suitable for fabrication of microstructures. Thin Solid Films. 296(1-2). 177–180. 9 indexed citations
5.
Offenberg, M., et al.. (1997). <title>Comprehensive study of processing parameters influencing the stress and stress gradient of thick polysilicon layers</title>. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 3223. 130–141. 7 indexed citations
6.
Offenberg, M., et al.. (1996). Acceleration Sensor in Surface Micromachining for Airbag Applications with High Signal/Noise Ratio. SAE technical papers on CD-ROM/SAE technical paper series. 1. 21 indexed citations
7.
López-Villegas, J.M., et al.. (1996). Influence of the Technological Parameters on the Mechanical Properties of Thick Epipolysilicon Layers for Micromechanical Sensors. Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena. 51-52. 423–428. 1 indexed citations
8.
Lange, Peter J. de, et al.. (1995). Surface Micromachined Accelerometer with Increased Working Capacitance and Force Feedback Operation. Fraunhofer-Publica (Fraunhofer-Gesellschaft). 1 indexed citations
9.
Lange, Peter J. de, et al.. (1995). Thick-polysilicon-based surface micromachined capacitive accelerometer with force-feedback operation. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 2642. 84–84. 6 indexed citations
10.
Rubloff, Gary W., M. Offenberg, & M. Liehr. (1994). Integrated processing of MOS gate dielectric structures. IEEE Transactions on Semiconductor Manufacturing. 7(1). 96–100. 2 indexed citations
11.
Warren, W. L., Edward H. Poindexter, M. Offenberg, & W. Müller‐Warmuth. (1992). Paramagnetic Point Defects in Amorphous Silicon Dioxide and Amorphous Silicon Nitride Thin Films: I .. Journal of The Electrochemical Society. 139(3). 872–880. 86 indexed citations
12.
Offenberg, M., M. Liehr, & Gary W. Rubloff. (1991). Surface etching and roughening in integrated processing of thermal oxides. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 9(3). 1058–1065. 31 indexed citations
13.
Kasi, S. R., M. Liehr, P. Thiry, H. Dallaporta, & M. Offenberg. (1991). Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality. Applied Physics Letters. 59(1). 108–110. 60 indexed citations
14.
Offenberg, M., M. Liehr, S. R. Kasi, & Gary W. Rubloff. (1990). Role of surface passivation in the integrated processing of MOS structures. 117–118. 1 indexed citations
15.
Liehr, M., C. Michael Greenlief, M. Offenberg, & S. R. Kasi. (1990). Equilibrium surface hydrogen coverage during silicon epitaxy using SiH4. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 8(3). 2960–2964. 87 indexed citations
16.
Offenberg, M., et al.. (1989). Effects of ion implantation on the interfacial properties of MOS systems. Applied Surface Science. 39(1-4). 259–265. 2 indexed citations
17.
Baten, Jasper M. van, M. Offenberg, U. Emmerichs, et al.. (1989). Diffusion of cobalt and titanium in SiO2. Applied Surface Science. 39(1-4). 266–272. 16 indexed citations
18.
Offenberg, M., et al.. (1988). EFFECTS OF MECHANICAL STRESS ON MOS STRUCTURES WITH TiSi2 GATES. Le Journal de Physique Colloques. 49(C4). C4–45. 2 indexed citations
19.
Neitzert, H. C., M. Offenberg, & P. Balk. (1987). Hole capture in SiO2 films after ion implantation. Applied Surface Science. 30(1-4). 272–277. 5 indexed citations
20.
Offenberg, M. & P. Balk. (1987). Ion implantation induced stoichiometric imbalance in SiO2. Applied Surface Science. 30(1-4). 265–271. 9 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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