Karey Holland

501 total citations
16 papers, 371 citations indexed

About

Karey Holland is a scholar working on Biomedical Engineering, Electrical and Electronic Engineering and Mechanical Engineering. According to data from OpenAlex, Karey Holland has authored 16 papers receiving a total of 371 indexed citations (citations by other indexed papers that have themselves been cited), including 12 papers in Biomedical Engineering, 11 papers in Electrical and Electronic Engineering and 5 papers in Mechanical Engineering. Recurrent topics in Karey Holland's work include Advanced Surface Polishing Techniques (11 papers), Integrated Circuits and Semiconductor Failure Analysis (5 papers) and Advancements in Photolithography Techniques (4 papers). Karey Holland is often cited by papers focused on Advanced Surface Polishing Techniques (11 papers), Integrated Circuits and Semiconductor Failure Analysis (5 papers) and Advancements in Photolithography Techniques (4 papers). Karey Holland collaborates with scholars based in United States and Belgium. Karey Holland's co-authors include T. Bibby, T.S. Cale, Stephen P. Beaudoin, Duo Wang, Gregory C. Davis, J.A.S. Adams, Thomas P. Wright, Peter T. Kissinger, W. Cote and Yun Zhuang and has published in prestigious journals such as Journal of The Electrochemical Society, Thin Solid Films and Japanese Journal of Applied Physics.

In The Last Decade

Karey Holland

15 papers receiving 341 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Karey Holland United States 9 312 234 151 102 49 16 371
Parshuram B. Zantye United States 4 443 1.4× 230 1.0× 196 1.3× 230 2.3× 53 1.1× 11 510
T. Bibby United States 7 286 0.9× 202 0.9× 117 0.8× 93 0.9× 49 1.0× 11 324
Dipto G. Thakurta United States 8 356 1.1× 269 1.1× 112 0.7× 140 1.4× 72 1.5× 9 375
Qinzhi Xu China 13 269 0.9× 177 0.8× 130 0.9× 164 1.6× 71 1.4× 36 404
Xing Ding China 11 189 0.6× 56 0.2× 237 1.6× 172 1.7× 107 2.2× 38 404
Kathleen C. Richardson United States 10 108 0.3× 62 0.3× 228 1.5× 77 0.8× 24 0.5× 11 409
Jiunnjye Tsaur Japan 10 261 0.8× 56 0.2× 274 1.8× 172 1.7× 30 0.6× 25 407
N. Ohashi Japan 10 200 0.6× 46 0.2× 290 1.9× 84 0.8× 46 0.9× 32 382
Kamili M. Jackson United States 8 148 0.5× 76 0.3× 186 1.2× 113 1.1× 130 2.7× 14 355
Ersin Kayahan Türkiye 9 139 0.4× 68 0.3× 124 0.8× 208 2.0× 20 0.4× 24 335

Countries citing papers authored by Karey Holland

Since Specialization
Citations

This map shows the geographic impact of Karey Holland's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Karey Holland with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Karey Holland more than expected).

Fields of papers citing papers by Karey Holland

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Karey Holland. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Karey Holland. The network helps show where Karey Holland may publish in the future.

Co-authorship network of co-authors of Karey Holland

This figure shows the co-authorship network connecting the top 25 collaborators of Karey Holland. A scholar is included among the top collaborators of Karey Holland based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Karey Holland. Karey Holland is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

16 of 16 papers shown
1.
Holland, Karey & S. Holland. (2025). Semiconductor technology roadmaps and lithography implications. 53–53.
2.
3.
Cote, W., et al.. (2003). Submicron wiring technology with tungsten and planarization. 5. 21–28. 7 indexed citations
4.
Holland, Karey, et al.. (2002). Cu CMP with orbital technology: summary of the experience. 364–371. 7 indexed citations
5.
Bibby, Thomas S., John H. Adams, & Karey Holland. (1999). Optical endpoint detection for chemical mechanical planarization. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 17(5). 2378–2384. 6 indexed citations
6.
Zhong, Lei, et al.. (1999). A Static Model for Scratches Generated during Aluminum Chemical-Mechanical Polishing Process: Orbital Technology. Japanese Journal of Applied Physics. 38(4R). 1932–1932. 19 indexed citations
7.
Yang, Lin‐An, et al.. (1999). Selectivity switch concept in Cu chemical mechanical planarization and its implementation on orbital tools. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 17(5). 2262–2271. 2 indexed citations
8.
Bibby, T. & Karey Holland. (1998). Endpoint detection for CMP. Journal of Electronic Materials. 27(10). 1073–1081. 31 indexed citations
9.
Beaudoin, Stephen P., et al.. (1997). Stress distribution in chemical mechanical polishing. Thin Solid Films. 308-309. 533–537. 83 indexed citations
10.
Bibby, T., et al.. (1997). CMP CoO reduction: slurry reprocessing. Thin Solid Films. 308-309. 538–542. 19 indexed citations
11.
Wang, Duo, et al.. (1997). Von Mises Stress in Chemical‐Mechanical Polishing Processes. Journal of The Electrochemical Society. 144(3). 1121–1127. 130 indexed citations
12.
Holland, Karey, et al.. (1993). Isolated-grouped linewidth bias on SVGL Micrascan. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 1927. 333–333. 2 indexed citations
13.
Holland, Karey, et al.. (1993). Positive DUV resist (APEX-E) by IBM for SVGL Micrascan. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 1926. 208–208. 4 indexed citations
14.
Holmes, Steven J., et al.. (1990). Deep-ultraviolet lithography for 500-nm devices. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 1264. 61–61. 10 indexed citations
15.
Cote, W., et al.. (1987). Submicron wiring technology with tungsten and planarization. 209–212. 19 indexed citations
16.
Davis, Gregory C., Karey Holland, & Peter T. Kissinger. (1979). Amperometric Methods for Oxidoreductase Enzymes Based on Liquid Chromatography with Electrochemical Detection. Alcohol Dehydrogenase. Journal of Liquid Chromatography. 2(5). 663–675. 12 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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