H. Kattelus

1.4k total citations
68 papers, 1.1k citations indexed

About

H. Kattelus is a scholar working on Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics and Biomedical Engineering. According to data from OpenAlex, H. Kattelus has authored 68 papers receiving a total of 1.1k indexed citations (citations by other indexed papers that have themselves been cited), including 53 papers in Electrical and Electronic Engineering, 23 papers in Atomic and Molecular Physics, and Optics and 21 papers in Biomedical Engineering. Recurrent topics in H. Kattelus's work include Semiconductor materials and devices (27 papers), Advanced MEMS and NEMS Technologies (21 papers) and Metal and Thin Film Mechanics (16 papers). H. Kattelus is often cited by papers focused on Semiconductor materials and devices (27 papers), Advanced MEMS and NEMS Technologies (21 papers) and Metal and Thin Film Mechanics (16 papers). H. Kattelus collaborates with scholars based in Finland, United States and Japan. H. Kattelus's co-authors include Jyrki Kiihamäki, Jaakko Saarilahti, A. Oja, Heikki Seppä, K. Affolter, T. Mattila, Riikka L. Puurunen, Pekka Rantakari, Ilkka Tittonen and M.−A. Nicolet and has published in prestigious journals such as Journal of The Electrochemical Society, Thin Solid Films and Surface and Coatings Technology.

In The Last Decade

H. Kattelus

66 papers receiving 1.0k citations

Peers

H. Kattelus

EEE

AMPO

BE

MC

MM

G.K. Reeves Australia

Anne‐Marie Papon France

M. Jaso United States

M. Hecker Germany

U. Smith Sweden

H. Norström Sweden

Mark J. Loboda United States

S. Baba Japan

David A. J. Moran United Kingdom

F.S. Hickernell United States

G.K. Reeves Australia

H. Kattelus

1.1k ×1.2

EEE

707 ×1.7

AMPO

200 ×0.6

BE

410 ×1.3

MC

144 ×0.5

MM

Citations per year, relative to H. Kattelus H. Kattelus (= 1×) peers G.K. Reeves

Countries citing papers authored by H. Kattelus

Since Specialization

Citations

This map shows the geographic impact of H. Kattelus's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by H. Kattelus with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites H. Kattelus more than expected).

Fields of papers citing papers by H. Kattelus

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by H. Kattelus. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by H. Kattelus. The network helps show where H. Kattelus may publish in the future.

Co-authorship network of co-authors of H. Kattelus

This figure shows the co-authorship network connecting the top 25 collaborators of H. Kattelus. A scholar is included among the top collaborators of H. Kattelus based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with H. Kattelus. H. Kattelus is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

1.

Mannila, Rami, et al.. (2015). Gas detection with microelectromechanical Fabry-Perot interferometer technology in cell phone. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 9482. 94820P–94820P. 9 indexed citations

2.

Puurunen, Riikka L., Heini Saloniemi, James Dekker, et al.. (2012). Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition. Sensors and Actuators A Physical. 188. 240–245. 15 indexed citations

3.

Heimala, Päivi, Ari Hokkanen, Kristiina Iljin, et al.. (2011). Stimulation of human embryonic stem cell‐derived cardiomyocytes on thin‐film microelectrodes. Biotechnology Journal. 6(5). 600–603. 4 indexed citations

4.

Puurunen, Riikka L., Tommi Suni, Oili Ylivaara, et al.. (2011). Direct wafer bonding of atomic layer deposited TiO<inf>2</inf> and Al<inf>2</inf>O<inf>3</inf> thin films. 978–981. 5 indexed citations

5.

Suni, Tommi, Riikka L. Puurunen, Oili Ylivaara, et al.. (2010). Bonding of ALD Alumina for Advanced SOI Substrates. ECS Transactions. 33(4). 137–144. 7 indexed citations

6.

Puurunen, Riikka L., et al.. (2010). Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra. Sensors and Actuators A Physical. 162(2). 210–214. 7 indexed citations

7.

Topper, Michael J., Matthias Klein, Bernhard Schmid, et al.. (2009). A 3-D packaging concept for cost effective packaging of MEMS and ASIC on wafer level. Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft). 1–5. 2 indexed citations

8.

Kiihamäki, Jyrki, et al.. (2005). Fabrication of single crystal silicon resonators with narrow gaps. 2. 1354–1357. 11 indexed citations

9.

Kattelus, H., et al.. (2005). Amorphous Mo–N and Mo–Si–N films in microelectromechanical systems. Fatigue & Fracture of Engineering Materials & Structures. 28(8). 743–749. 8 indexed citations

10.

Kiihamäki, Jyrki, et al.. (2004). “Plug-up”—a new concept for fabricating SOI MEMS devices. Microsystem Technologies. 10(5). 346–350. 3 indexed citations

11.

Kattelus, H., et al.. (2003). OS6(5)-21(OS06W0405) Characterization of Amorphous Electrically Conductive Mo-Si-N Films for Micromechanical Applications. 2003(0). 236–236.

12.

Mattila, T., A. Oja, Heikki Seppä, et al.. (2003). Micromechanical bulk acoustic wave resonator. 70. 945–948. 17 indexed citations

13.

Saarilahti, Jaakko, et al.. (2003). A novel methdod for processing capacitive micromechanical ultrasonic transducers (cMUT). 2. 1071–1074. 6 indexed citations

14.

Kattelus, H., et al.. (2002). Stress control of sputter-deposited Mo–N films for micromechanical applications. Microelectronic Engineering. 60(1-2). 97–105. 22 indexed citations

15.

Kiihamäki, Jyrki, et al.. (2002). Use of electrical test structures to characterize trench profiles etched on SOI wafers. 159–164. 2 indexed citations

16.

Kattelus, H., et al.. (1999). Passive Integration Process on Standard and High Resistivity Silicon. 3830(3). 194–199. 5 indexed citations

17.

Hirvonen, J-P., I. Suni, H. Kattelus, et al.. (1993). Microstructure and Mechanical Properties of Nitrided Molybdenum Silicide Coatings. MRS Proceedings. 322. 2 indexed citations

18.

Kattelus, H., et al.. (1993). Layered tantalum-aluminum oxide films deposited by atomic layer epitaxy. Thin Solid Films. 225(1-2). 296–298. 46 indexed citations

19.

Kattelus, H.. (1988). Diffusion barriers in semiconductor contact metallization. PhDT. 6 indexed citations

20.

Lux, R. A., et al.. (1985). TiB2 and ZrB2 diffusion barriers in GaAs Ohmic contact technology. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 3(6). 2255–2258. 46 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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