B. Dal’zotto

582 citations

35 papers · 448 indexed · h-index 12

Co-authors: S. Tedesco M. Heitzmann P. Butaud Julien Vidal B. Pannetier Xavier Letartre M. Zelsmann T. Charvolin
Topics: Advancements in Photolithography Techniques (21 papers)Integrated Circuits and Semiconductor Failure Analysis (11 papers)Semiconductor materials and devices (10 papers)
Cited by: Surfaces, Coatings and Films Atomic and Molecular Physics, and Optics Electrical and Electronic Engineering
Journals: Physical Review Letters Applied Physics Letters Japanese Journal of Applied Physics
Partner nations: France Switzerland United States

In The Last Decade

B. Dal’zotto

34 papers receiving 432 citations

Peers

Countries citing papers authored by B. Dal’zotto

Since Specialization

Citations

This map shows the geographic impact of B. Dal’zotto's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by B. Dal’zotto with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites B. Dal’zotto more than expected).

Fields of papers citing papers by B. Dal’zotto

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by B. Dal’zotto. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by B. Dal’zotto. The network helps show where B. Dal’zotto may publish in the future.

Co-authorship network of co-authors of B. Dal’zotto

This figure shows the co-authorship network connecting the top 25 collaborators of B. Dal’zotto. A scholar is included among the top collaborators of B. Dal’zotto based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with B. Dal’zotto. B. Dal’zotto is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Non-CAR resists and advanced materials for Massively Parallel E-Beam Direct Write process integration 2016 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown),(unknown),(unknown),(unknown),B. Dal’zotto,(unknown),(unknown),(unknown),Marco Wieland	3
2	Ultimate lithographic performances of advanced resists CAR or non-CAR resist? 2012 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·(unknown),(unknown),(unknown),(unknown),(unknown),(unknown),B. Dal’zotto,(unknown)	7
3	Comparison of EUV and e-beam lithographic technologies for sub-22-nm node patterning 2012 ·Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·James F. Cameron,(unknown),(unknown),(unknown),(unknown),(unknown),(unknown),(unknown),(unknown),(unknown),(unknown),(unknown),B. Dal’zotto,(unknown),(unknown)	3
4	Disturbance Effects in Extreme Ultraviolet Interferometric Lithography Affecting Interference Fringes 2010 ·Japanese Journal of Applied Physics ·(unknown),(unknown),(unknown),B. Dal’zotto,(unknown)	1
5	Scalability of fully-depleted SOI technology into 0.13 μm 1.2 V-1 V CMOS generation 2003 ·C. Raynaud,O. Faynot,J.L. Pelloie,F. Martín,S. Tedesco,J. Cluzel,A. Grouillet,B. Dal’zotto,D. Vanhoenacker	1
6	Efficient light coupling into sub-micrometer rib and strip SOI waveguides 2002 ·Integrated Photonics Research ·Pascal Demange,S. Lardenois,Éric Cassan,A. Köster,S. Laval,M. Heitzmann,L. Mollard,B. Dal’zotto,(unknown),Régis Orobtchouk	2
7	Transmission spectroscopy of photonic crystals in a silicon-on-insulator waveguide structure 2002 ·Applied Physics Letters ·M. Zelsmann,Emmanuelle Picard,T. Charvolin,E. Hadji,B. Dal’zotto,(unknown),Christian Seassal,P. Rojo-Roméo,Xavier Letartre	11
8	Realization of two-dimensional optical devices using photonic band gap structures on silicon-on-insulator 2002 ·Microelectronic Engineering ·T. Charvolin,E. Hadji,Emmanuelle Picard,(unknown),M. Assous,B. Dal’zotto,(unknown),S. Tedesco,Xavier Letartre,P. Rojo-Roméo,Christian Seassal	4
9	A 20 nm physical gate length NMOSFET with a 1.2 nm gate oxide fabricated by mixed dry and wet hard mask etching 2002 ·Solid-State Electronics ·C. Caillat,S. Deleonibus,G. Guégan,M. Heitzmann,(unknown),S. Tedesco,B. Dal’zotto,F. Martín,P. Mur,A.M. Papon,(unknown),B. Prévitali,A. Toffoli,F. Allain,(unknown),Fabrice Jourdan,(unknown),(unknown)	3
10	Hybrid deep UV–e-beam lithography for the fabrication of dual damascene structures 2001 ·Microelectronic Engineering ·L. Mollard,S. Tedesco,B. Dal’zotto,(unknown),L. Pain,(unknown),C. Comboroure,Y. Morand,M. Fayolle	0
11	A 20-nm physical gate length NMOSFET featuring 1.2 nm gate oxide, shallow implanted source and drain and BF ₂ pockets 2000 ·IEEE Electron Device Letters ·S. Deleonibus,C. Caillat,G. Guégan,M. Heitzmann,(unknown),S. Tedesco,B. Dal’zotto,F. Martín,P. Mur,A.M. Papon,(unknown),(unknown),(unknown)	24
12	Resolution limit of negative tone chemically amplified resist used for hybrid lithography: Influence of the molecular weight 2000 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·L. Pain,Craig Higgins,(unknown),S. Tedesco,B. Dal’zotto,C. Gourgon,Cristina Ribeiro,T. KUSUMOTO,(unknown),(unknown)	14
13	65 nm physical gate length NMOSFETs with heavy ion implanted pockets and highly reliable 2 nm-thick gate oxide for 1.5 V operation 1999 ·C. Caillat,S. Deleonibus,G. Guégan,S. Tedesco,B. Dal’zotto,M. Heitzmann,F. Martín,P. Mur,(unknown),F. Balestra	16
14	Magnetic Field Induced Localization in a Two-Dimensional Superconducting Wire Network 1999 ·Physical Review Letters ·(unknown),P. Butaud,(unknown),B. Pannetier,Julien Vidal,S. Tedesco,B. Dal’zotto	94
15	Domain structure of magnetic layers deposited on patterned silicon 1999 ·Applied Physics Letters ·S. Landis,B. Rodmacq,B. Diény,B. Dal’zotto,S. Tedesco,M. Heitzmann	35
16	Measuring acid generation efficiency in chemically amplified resists with all three beams 1999 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·Charles R. Szmanda,Robert L. Brainard,(unknown),(unknown),Tsutomu Tanaka,Yutaka Yamada,(unknown),S. Tedesco,B. Dal’zotto,W.H. Bruenger,(unknown),(unknown),Hans Loeschner,(unknown),(unknown),Adam R. Pawloski	40
17	Resist processes for hybrid (electron-beam/deep ultraviolet) lithography 1998 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·S. Tedesco,Thierry Mourier,B. Dal’zotto,(unknown),(unknown),Yves Quéré,Patrick J. Paniez,(unknown)	24
18	A heavy ion implanted pocket 0.10 μm n-type metal–oxide–semiconductor field effect transistor with hybrid lithography (electron-beam/deep ultraviolet) and specific gate passivation process 1996 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·F. Bénistant,(unknown),G. Guégan,(unknown),M. Heitzmann,B. Dal’zotto	4
19	Phase-shifting mask and top-imaging resist for subhalf-micron i-line and deep-ultraviolet lithography 1991 ·Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ·S. Tedesco,(unknown),Margarita Chevalier,B. Dal’zotto	2
20	HALF-MICROMETER N-MOS TECHNOLOGY FOR GIGABIT LOGIC 1988 ·Le Journal de Physique Colloques ·G. Guégan,(unknown),J. Gautier,Mathieu Guérin,S. Tedesco,B. Dal’zotto,G. Reimbold	1

About B. Dal’zotto

B. Dal’zotto is a scholar working on Surfaces, Coatings and Films, Electrical and Electronic Engineering and Atomic and Molecular Physics, and Optics, having authored 35 papers that have together received 448 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (21 papers), Integrated Circuits and Semiconductor Failure Analysis (11 papers) and Semiconductor materials and devices (10 papers). The work is most often cited by research in Surfaces, Coatings and Films (78 citations), Atomic and Molecular Physics, and Optics (209 citations) and Electrical and Electronic Engineering (298 citations). B. Dal’zotto has collaborated with scholars based in France, Switzerland and United States. Frequent co-authors include S. Tedesco, M. Heitzmann, P. Butaud, Julien Vidal, B. Pannetier, Xavier Letartre, M. Zelsmann, T. Charvolin, P. Rojo-Roméo and Christian Seassal. Their work appears in journals such as Physical Review Letters, Applied Physics Letters and Japanese Journal of Applied Physics.

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