Immediate Impact
8 standout
Citing Papers
Advances and significances of nanoparticles in semiconductor applications – A review
2023 Standout
The NIST REFPROP Database for Highly Accurate Properties of Industrially Important Fluids
2022 Standout
Works of T. Sparks being referenced
The Use of Unsaturated Fluorocarbons for Dielectric Etch Applications
2002
Evaluation of Pentafluoroethane and 1,1-Difluoroethane for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool
2000
Author Peers
| Author | Last Decade | Papers | Cites | ||||
|---|---|---|---|---|---|---|---|
| T. Sparks | 193 | 74 | 42 | 66 | 16 | 219 | |
| D. A. Danner | 213 | 45 | 42 | 46 | 16 | 254 | |
| Takashi Yunogami | 275 | 92 | 62 | 68 | 12 | 299 | |
| S. Kadomura | 199 | 60 | 69 | 55 | 20 | 229 | |
| Se-Jin Oh | 147 | 79 | 7 | 61 | 18 | 194 | |
| Ian Swindells | 130 | 52 | 5 | 70 | 9 | 162 | |
| S. G. Demos | 100 | 106 | 27 | 25 | 22 | 242 | |
| Pierre Barroy | 113 | 110 | 32 | 49 | 19 | 225 | |
| Mitsuhiro Omura | 125 | 82 | 14 | 19 | 15 | 143 | |
| A. Grouillet | 193 | 52 | 10 | 44 | 20 | 225 | |
| Lee M. Loewenstein | 148 | 74 | 13 | 21 | 23 | 268 |
All Works
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