Tsuneo Terasawa

1.4k citations
129 papers · 1.1k indexed · h-index 19
Topics
Advancements in Photolithography Techniques (114 papers)Integrated Circuits and Semiconductor Failure Analysis (59 papers)Electron and X-Ray Spectroscopy Techniques (55 papers)
Partner nations
JapanSouth KoreaGermany

In The Last Decade

Tsuneo Terasawa

118 papers receiving 891 citations

Peers

Tsuneo Terasawa
Comparison fields: 5 of 35
  • Electrical and Electronic Engineering 1.0k
  • Surfaces, Coatings and Films 564
  • Biomedical Engineering 305
  • Radiation 122
  • Industrial and Manufacturing Engineering 109
Replace Donis G. Flagello with:
Donis G. Flagello United States
S. Erasmus United States
Hans‐Ulrich Danzebrink Germany
S. Kaldor United States
Young-Pil Park South Korea
Kazuyoshi Sugihara Japan
M. Castagné France
Lin Zhou China
Antonı́n Mikš Czechia
Paul Dumas United States
Tsuneo Terasawa relative to Donis G. Flagello United States Donis G. Flagello's profile →
Citations per field
00.5×5.5×
Donis G. Flagello · 1×
Citations per year

Countries citing papers authored by Tsuneo Terasawa

Since Specialization
Citations

This map shows the geographic impact of Tsuneo Terasawa's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Tsuneo Terasawa with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Tsuneo Terasawa more than expected).

Fields of papers citing papers by Tsuneo Terasawa

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Tsuneo Terasawa. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Tsuneo Terasawa. The network helps show where Tsuneo Terasawa may publish in the future.

Co-authorship network of co-authors of Tsuneo Terasawa

This figure shows the co-authorship network connecting the top 25 collaborators of Tsuneo Terasawa. A scholar is included among the top collaborators of Tsuneo Terasawa based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Tsuneo Terasawa. Tsuneo Terasawa is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
#WorkIndexed citations
1 11
2 10
3 1
4 5
5 1
6 1
7 36
8 6
9 6
10
Actinic Inspection of EUV Programmed Multilayer Defects and Cross-Comparison Measurements
3
11 4
12 20
13 2
14 5
15 3
16 15
17 0
18 6
19 2
20 43

About Tsuneo Terasawa

Tsuneo Terasawa is a scholar working on Surfaces, Coatings and Films, Industrial and Manufacturing Engineering and Electrical and Electronic Engineering, having authored 129 papers that have together received 1.1k indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (114 papers), Integrated Circuits and Semiconductor Failure Analysis (59 papers) and Electron and X-Ray Spectroscopy Techniques (55 papers). The work is most often cited by research in Surfaces, Coatings and Films (564 citations), Electrical and Electronic Engineering (1.0k citations) and Structural Biology (21 citations). Tsuneo Terasawa has collaborated with scholars based in Japan, South Korea and Germany. Frequent co-authors include Toshihiko Tanaka, Toshihisa Tomie, Takeshi Yamane, Norio Hasegawa, Tsuyoshi Amano, Osamu Suga, Hidehiro Watanabe, Masaaki Ito, Hiroshi Fukuda and Shinji Okazaki. Their work appears in journals such as Applied Physics Letters, Journal of Applied Mechanics and IEEE Transactions on Electron Devices.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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