Mitsuaki Morigami

525 total citations
11 papers, 444 citations indexed

About

Mitsuaki Morigami is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Radiation. According to data from OpenAlex, Mitsuaki Morigami has authored 11 papers receiving a total of 444 indexed citations (citations by other indexed papers that have themselves been cited), including 10 papers in Electrical and Electronic Engineering, 7 papers in Biomedical Engineering and 4 papers in Radiation. Recurrent topics in Mitsuaki Morigami's work include Advancements in Photolithography Techniques (10 papers), Advanced X-ray Imaging Techniques (4 papers) and Advanced Surface Polishing Techniques (4 papers). Mitsuaki Morigami is often cited by papers focused on Advancements in Photolithography Techniques (10 papers), Advanced X-ray Imaging Techniques (4 papers) and Advanced Surface Polishing Techniques (4 papers). Mitsuaki Morigami collaborates with scholars based in Japan. Mitsuaki Morigami's co-authors include Toshihiko Tanaka, Nobufumi Atoda, Hiroaki Oizumi, Taro Ogawa, Junichi Nishino, Jun-ichi Chikawa, Shigeo Suzuki, Kenichiro Tanaka, Yoshio Yamashita and Takeo Watanabe and has published in prestigious journals such as Journal of The Electrochemical Society, Japanese Journal of Applied Physics and Microelectronic Engineering.

In The Last Decade

Mitsuaki Morigami

10 papers receiving 415 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Mitsuaki Morigami Japan 6 291 269 100 79 57 11 444
K. Ansari Singapore 12 266 0.9× 275 1.0× 72 0.7× 63 0.8× 75 1.3× 23 446
W. Erfurth Germany 11 177 0.6× 158 0.6× 31 0.3× 130 1.6× 96 1.7× 23 350
Jungna Heo South Korea 11 180 0.6× 72 0.3× 73 0.7× 217 2.7× 28 0.5× 19 336
S. Fakhfakh Tunisia 14 244 0.8× 69 0.3× 240 2.4× 171 2.2× 43 0.8× 40 455
A. Zöller Germany 7 213 0.7× 80 0.3× 120 1.2× 128 1.6× 50 0.9× 23 338
Ken-ichiro Nakamatsu Japan 14 252 0.9× 306 1.1× 29 0.3× 118 1.5× 156 2.7× 40 453
Patrick J. Paniez France 10 240 0.8× 133 0.5× 67 0.7× 53 0.7× 47 0.8× 54 333
G. Kissinger Germany 13 591 2.0× 108 0.4× 21 0.2× 240 3.0× 204 3.6× 105 677
Yoshihiro Todokoro Japan 11 451 1.5× 76 0.3× 43 0.4× 209 2.6× 130 2.3× 39 493
J. Benedict United States 8 205 0.7× 79 0.3× 63 0.6× 140 1.8× 67 1.2× 19 351

Countries citing papers authored by Mitsuaki Morigami

Since Specialization
Citations

This map shows the geographic impact of Mitsuaki Morigami's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Mitsuaki Morigami with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Mitsuaki Morigami more than expected).

Fields of papers citing papers by Mitsuaki Morigami

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Mitsuaki Morigami. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Mitsuaki Morigami. The network helps show where Mitsuaki Morigami may publish in the future.

Co-authorship network of co-authors of Mitsuaki Morigami

This figure shows the co-authorship network connecting the top 25 collaborators of Mitsuaki Morigami. A scholar is included among the top collaborators of Mitsuaki Morigami based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Mitsuaki Morigami. Mitsuaki Morigami is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

11 of 11 papers shown
1.
Yamashita, Yoshio, et al.. (1994). Evaluation of quarter to sub-quarter micron patterning in x-ray lithography.. Journal of Photopolymer Science and Technology. 7(3). 551–560. 2 indexed citations
2.
Tanaka, Toshihiko, et al.. (1994). Prevention of Resist Pattern Collapse by Flood Exposure during Rinse Process. Japanese Journal of Applied Physics. 33(12B). L1803–L1803. 22 indexed citations
3.
Tanaka, Toshihiko, et al.. (1994). Prevention of Resist Pattern Collapse by Resist Heating during Rinsing. Journal of The Electrochemical Society. 141(12). L169–L171. 21 indexed citations
4.
Tanaka, Toshihiko, Mitsuaki Morigami, Miyuki Harada, et al.. (1993). Pattern replication accuracy in 1 : 1 SR lithography. Microelectronic Engineering. 21(1-4). 71–74. 1 indexed citations
5.
Tanaka, Toshihiko, Mitsuaki Morigami, Hiroaki Oizumi, & Taro Ogawa. (1993). Freeze-Drying Process to Avoid Resist Pattern Collapse. Japanese Journal of Applied Physics. 32(12R). 5813–5813. 44 indexed citations
6.
Tanaka, Toshihiko, Mitsuaki Morigami, Takeo Watanabe, et al.. (1993). Pattern replication accuracy in 1:1 synchrotron radiation lithography. Microelectronic Engineering. 20(4). 277–289. 1 indexed citations
7.
Tanaka, Toshihiko, Mitsuaki Morigami, & Nobufumi Atoda. (1993). Mechanism of Resist Pattern Collapse during Development Process. Japanese Journal of Applied Physics. 32(12S). 6059–6059. 285 indexed citations
8.
Koga, Kazunori, et al.. (1993). Linewidth control in 1:1 SR lithography. Microelectronic Engineering. 21(1-4). 87–90. 2 indexed citations
9.
Harada, Miyuki, Junichi Nishino, Makoto Inai, et al.. (1993). <title>Fabrication of x-ray masks with 0.15-um level two-dimensional patterns by using highly accurate FIB lithography</title>. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 1924. 82–88. 3 indexed citations
10.
Tanaka, Toshihiko, Mitsuaki Morigami, & Nobufumi Atoda. (1993). Mechanism of Resist Pattern Collapse. Journal of The Electrochemical Society. 140(7). L115–L116. 41 indexed citations
11.
Nishino, Junichi, et al.. (1990). Photochemical Etching of GaAs using Synchrotron Radiation. Japanese Journal of Applied Physics. 29(5A). L709–L709. 22 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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