Kunihiko Kasama

785 total citations
57 papers, 612 citations indexed

About

Kunihiko Kasama is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films. According to data from OpenAlex, Kunihiko Kasama has authored 57 papers receiving a total of 612 indexed citations (citations by other indexed papers that have themselves been cited), including 50 papers in Electrical and Electronic Engineering, 25 papers in Biomedical Engineering and 15 papers in Surfaces, Coatings and Films. Recurrent topics in Kunihiko Kasama's work include Advancements in Photolithography Techniques (39 papers), Nanofabrication and Lithography Techniques (18 papers) and Optical Coatings and Gratings (13 papers). Kunihiko Kasama is often cited by papers focused on Advancements in Photolithography Techniques (39 papers), Nanofabrication and Lithography Techniques (18 papers) and Optical Coatings and Gratings (13 papers). Kunihiko Kasama collaborates with scholars based in Japan and Germany. Kunihiko Kasama's co-authors include Toshiro Itani, Kôichi Kikuchi, Shigeyoshi Arai, Hiroshi Kokubun, Shuichi Hashimoto, Sadaaki Yamamoto, Masaru Tsukiji, M. Sakamoto, Hiroyoshi Tanabe and T. Oka and has published in prestigious journals such as Journal of Applied Physics, The Journal of Physical Chemistry and IEEE Journal of Solid-State Circuits.

In The Last Decade

Kunihiko Kasama

53 papers receiving 563 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Kunihiko Kasama Japan 16 371 151 124 114 107 57 612
И. В. Соболева Russia 15 345 0.9× 245 1.6× 187 1.5× 151 1.3× 471 4.4× 73 791
Akihiro Yoshino Japan 13 103 0.3× 125 0.8× 50 0.4× 147 1.3× 80 0.7× 56 511
Christiane Carré France 13 175 0.5× 68 0.5× 51 0.4× 174 1.5× 223 2.1× 40 506
C. M. C. Gambi Italy 12 74 0.2× 106 0.7× 100 0.8× 113 1.0× 197 1.8× 47 515
В. В. Шелковников Russia 11 120 0.3× 125 0.8× 65 0.5× 156 1.4× 243 2.3× 127 549
Dobrin P. Bossev United States 11 120 0.3× 41 0.3× 74 0.6× 105 0.9× 115 1.1× 21 479
Martin Wagner United States 12 139 0.4× 110 0.7× 62 0.5× 139 1.2× 255 2.4× 26 471
Toshikazu Tsuchiya Japan 10 103 0.3× 67 0.4× 43 0.3× 173 1.5× 102 1.0× 40 419
A. Di Biasio Italy 15 106 0.3× 260 1.7× 176 1.4× 109 1.0× 50 0.5× 41 525
S. Naumov Germany 11 105 0.3× 54 0.4× 65 0.5× 133 1.2× 30 0.3× 13 444

Countries citing papers authored by Kunihiko Kasama

Since Specialization
Citations

This map shows the geographic impact of Kunihiko Kasama's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Kunihiko Kasama with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Kunihiko Kasama more than expected).

Fields of papers citing papers by Kunihiko Kasama

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Kunihiko Kasama. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Kunihiko Kasama. The network helps show where Kunihiko Kasama may publish in the future.

Co-authorship network of co-authors of Kunihiko Kasama

This figure shows the co-authorship network connecting the top 25 collaborators of Kunihiko Kasama. A scholar is included among the top collaborators of Kunihiko Kasama based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Kunihiko Kasama. Kunihiko Kasama is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Bergmann, K., et al.. (2016). High-radiance LDP source: clean, reliable, and stable EUV source for mask inspection. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 9776. 97760L–97760L. 5 indexed citations
2.
Sugibayashi, Tadahiko, Kentaro Shibahara, K. Koyama, et al.. (2002). A 1 Gb DRAM for file applications. 254–255,. 4 indexed citations
3.
Itani, Toshiro, et al.. (1999). Effects of polymer structure on dissolution characteristics in chemically amplified 193-nm resists. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 3678. 306–306. 2 indexed citations
4.
Itani, Toshiro, et al.. (1998). Deblocking reaction of chemically amplified ArF positive resists. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 3333. 32–32. 4 indexed citations
5.
Yoshino, Akira & Kunihiko Kasama. (1998). Redistribution Process of Oxygen Atoms in Separation-by-Implanted-Oxygen (SIMOX) Substrates. Japanese Journal of Applied Physics. 37(2R). 471–471. 4 indexed citations
6.
Hashimoto, Shuichi, et al.. (1997). Acid evaporation property in chemically amplified resists. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 3049. 248–248. 1 indexed citations
7.
Itani, Toshiro, et al.. (1996). A study of acid diffusion in chemically amplified deep ultraviolet resist. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 14(6). 4226–4228. 35 indexed citations
8.
Itani, Toshiro, et al.. (1995). Photoacid bulkiness effect on dissolution kinetics in chemically amplified deep ultraviolet resists. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 13(6). 3026–3029. 23 indexed citations
9.
Itani, Toshiro, et al.. (1995). <title>Optimization of dissolution-rate characteristics of chemically amplified positive resist</title>. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 2438. 191–201. 6 indexed citations
10.
Uchiyama, Takayuki, et al.. (1995). Standing Wave Effect of Various Illumination Methods in 0.25 µm KrF Excimer Laser Lithography. Japanese Journal of Applied Physics. 34(12S). 6560–6560. 3 indexed citations
11.
Kasama, Kunihiko, et al.. (1995). <title>Effect of resist surface insoluble layer in attenuated phase-shift mask for window pattern formation</title>. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 2440. 804–815. 2 indexed citations
12.
Itani, Toshiro, et al.. (1994). Dissolution characteristics optimization for chemically amplified positive resist. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 2195. 126–126. 2 indexed citations
13.
Kasama, Kunihiko, et al.. (1993). NA and Σ optimization for high-NA i-line lithography. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 1927. 310–310. 2 indexed citations
14.
Kasama, Kunihiko, et al.. (1992). Fabrication and evaluation of chromium/phase-shifter/quartz structure phase-shift mask. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 1674. 241–241. 1 indexed citations
15.
Yoshino, Akira, Kunihiko Kasama, & Masanobu Sakamoto. (1989). Oxygen-redistribution process in SIMOX. Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms. 39(1-4). 203–206. 8 indexed citations
16.
Kasama, Kunihiko, et al.. (1982). Relaxation mechanism of excited acridine in methyl methacrylate and poly(methyl methacrylate). The Journal of Physical Chemistry. 86(24). 4733–4737. 18 indexed citations
17.
Kasama, Kunihiko, et al.. (1982). Photochemical reactions of triplet acetone with indole, purine, and pyrimidine derivatives. The Journal of Physical Chemistry. 86(13). 2420–2427. 49 indexed citations
18.
Kasama, Kunihiko, et al.. (1981). Relaxation mechanism of excited acridine in nonreactive solvents. The Journal of Physical Chemistry. 85(10). 1291–1296. 56 indexed citations
19.
Kasama, Kunihiko, et al.. (1981). Deactivation mechanism of excited acridine and 9-substituted acridines in water. The Journal of Physical Chemistry. 85(26). 4148–4153. 44 indexed citations
20.
Kasama, Kunihiko, et al.. (1978). TEMPERATURE EFFECT ON THE INTERSYSTEM CROSSING OF ACRIDINE IN VARIOUS SOLVENTS. Chemistry Letters. 7(3). 247–250. 6 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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