Hirofumi Funabashi

742 total citations
25 papers, 614 citations indexed

About

Hirofumi Funabashi is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Materials Chemistry. According to data from OpenAlex, Hirofumi Funabashi has authored 25 papers receiving a total of 614 indexed citations (citations by other indexed papers that have themselves been cited), including 21 papers in Electrical and Electronic Engineering, 16 papers in Biomedical Engineering and 4 papers in Materials Chemistry. Recurrent topics in Hirofumi Funabashi's work include Advanced MEMS and NEMS Technologies (12 papers), Advanced Sensor and Energy Harvesting Materials (6 papers) and Advanced Surface Polishing Techniques (5 papers). Hirofumi Funabashi is often cited by papers focused on Advanced MEMS and NEMS Technologies (12 papers), Advanced Sensor and Energy Harvesting Materials (6 papers) and Advanced Surface Polishing Techniques (5 papers). Hirofumi Funabashi collaborates with scholars based in Japan, Switzerland and United States. Hirofumi Funabashi's co-authors include Osamu Tabata, Susumu Sugiyama, Keiichi Shimaoka, Toshiyuki Tsuchiya, Jiro Sakata, Yoshiyuki Hata, Takahiro Nakayama, Yutaka Nonomura, Kanae Hamaguchi and Masanori Muroyama and has published in prestigious journals such as Applied Physics Letters, Journal of Applied Physics and Journal of the European Ceramic Society.

In The Last Decade

Hirofumi Funabashi

23 papers receiving 589 citations

Peers

Countries citing papers authored by Hirofumi Funabashi

Since Specialization

Citations

This map shows the geographic impact of Hirofumi Funabashi's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Hirofumi Funabashi with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Hirofumi Funabashi more than expected).

Fields of papers citing papers by Hirofumi Funabashi

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Hirofumi Funabashi. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Hirofumi Funabashi. The network helps show where Hirofumi Funabashi may publish in the future.

Co-authorship network of co-authors of Hirofumi Funabashi

This figure shows the co-authorship network connecting the top 25 collaborators of Hirofumi Funabashi. A scholar is included among the top collaborators of Hirofumi Funabashi based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Hirofumi Funabashi. Hirofumi Funabashi is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Stress Isolation Suspension for Silicon-on-Insulator 3-Axis Accelerometer Designed by Topology Optimization Method 2022 ·IEEE Sensors Journal ·(unknown), Atsushi Kawamoto, S. Hashimoto, (unknown), Hirofumi Funabashi, (unknown), Yoshiyuki Hata, Takashi Ozaki, (unknown), Yutaka Nonomura, Takahiro Nakayama, Hitoshi Yamada	3
2	Improved anchor design for flat MEMS structure by suppressing deformation due to buried-oxide stress on silicon-on-insulator wafer 2021 ·Journal of Micromechanics and Microengineering ·(unknown), Takashi Ozaki, (unknown), Hirofumi Funabashi, (unknown), Yutaka Nonomura	1
3	Wafer-level hermetic vacuum packaging by bonding with a copper–tin thin film sealing ring 2018 ·Journal of Micromechanics and Microengineering ·(unknown), Hirofumi Funabashi, Hideki Takagi, (unknown), Yoshiyuki Hata	5
4	Orientation mechanism during crystallization of apatite-type lanthanum silicate thin films from an amorphous precursor 2017 ·Journal of the European Ceramic Society ·(unknown), (unknown), Hirofumi Funabashi, Hiroko Iguchi, (unknown), Toshihiko Tani	3
5	300 μm Deep through silicon via in laser-ablated CMOS multi-project wafer for cost-effective development of integrated MEMS 2017 ·(unknown), (unknown), Masanori Muroyama, Yoshiyuki Hata, Takahiro Nakayama, (unknown), Hideki Hirano, Yutaka Nonomura, Hirofumi Funabashi, Shuji Tanaka	11
6	Tactile sensor network system with CMOS-MEMS integration for social robot applications 2014 ·Masanori Muroyama, Mitsutoshi Makihata, Shuji Tanaka, (unknown), Takahiro Nakayama, (unknown), Hitoshi Yamada, Yutaka Nonomura, Hirofumi Funabashi, Yoshiyuki Hata, Masayoshi Esashi	8
7	Development of a 35Mbps Asynchronous Bus Based Communication System for Tactile Sensors 2014 ·IEEJ Transactions on Sensors and Micromachines ·Mitsutoshi Makihata, Masanori Muroyama, (unknown), Takahiro Nakayama, (unknown), Hitoshi Yamada, Yutaka Nonomura, Hirofumi Funabashi, Yoshiyuki Hata, Shuji Tanaka, Masayoshi Esashi	1
8	Testing, Repairing and Packaging Technology for the CMOS-MEMS Integrated Tactile Sensor 2013 ·IEEJ Transactions on Sensors and Micromachines ·Mitsutoshi Makihata, Masanori Muroyama, (unknown), Takahiro Nakayama, (unknown), Hitoshi Yamada, Yutaka Nonomura, Hirofumi Funabashi, Yoshiyuki Hata, Shuji Tanaka, Masayoshi Esashi	1
9	A z-axis differential capacitive SOI accelerometer with vertical comb electrodes 2004 ·Sensors and Actuators A Physical ·Toshiyuki Tsuchiya, Hirofumi Funabashi	48
10	Young’s Modulus Measurement for Polysilicon Thin Film by Tensile Testing 2003 ·IEEJ Transactions on Sensors and Micromachines ·Toshiyuki Tsuchiya, Hirofumi Funabashi	3
11	OS6(1)-1(OS06W0384) Young's Modulus Measurement of Polysilicon Thin Film Using Thin Film Tensile Tester Equipped with Electrostatic Force Grip 2003 ·Toshiyuki Tsuchiya, Hirofumi Funabashi	1
12	OS06W0384 Young's modulus measurement of polysilicon thin film using thin film tensile tester equipped with electrostatic force grip 2003 ·Toshiyuki Tsuchiya, Hirofumi Funabashi	1
13	Formation of porous grain boundaries in polycrystalline silicon thin films 2002 ·Journal of Applied Physics ·(unknown), (unknown), Toshiyuki Tsuchiya, Hirofumi Funabashi, Jiro Sakata	4
14	Polysilicon vibrating gyroscope vacuum-encapsulated in an on-chip micro chamber 2001 ·Sensors and Actuators A Physical ·Toshiyuki Tsuchiya, (unknown), Hirofumi Funabashi, Jiro Sakata	46
15	Correlation between dielectric breakdown and charge generation in silicon oxide films 1997 ·Applied Physics Letters ·(unknown), Yukihiko Watanabe, Hirofumi Funabashi, (unknown), Yasunori Taga	1
16	A solid‐phase epitaxy with clean surface formation using SiH₄ and Evaluation of SOI Layer 1996 ·Electronics and Communications in Japan (Part II Electronics) ·Masahito Kodama, Hirofumi Funabashi, (unknown), Yasunori Taga	1
17	Anisotropic etching of silicon in TMAH solutions 1992 ·Sensors and Actuators A Physical ·Osamu Tabata, (unknown), Hirofumi Funabashi, Keiichi Shimaoka, Susumu Sugiyama	380
18	ANISOTROPIC ETCHING OF SILICON IN (CH3)4NOH SOLUTIONS 1991 ·Osamu Tabata, (unknown), Hirofumi Funabashi, Susumu Sugiyama	23
19	One-chip integrated pressure sensor 1990 ·Electrical Engineering in Japan ·Susumu Sugiyama, (unknown), Hirofumi Funabashi, Keiichi Shimaoka, (unknown), Isemi Igarashi	3
20	One-Chip Integrated Pressure sensor 1989 ·IEEJ Transactions on Electronics Information and Systems ·Susumu Sugiyama, (unknown), Hirofumi Funabashi, Keiichi Shimaoka, (unknown), Isemi Igarashi	0

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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