D.R. Sparks

856 citations

29 papers · 635 indexed · h-index 14

Impact in

Electrical and Electronic Engineering top 10%
- Advanced MEMS and NEMS Technologies
- 3D IC and TSV technologies
- Electronic Packaging and Soldering Technologies
- Silicon and Solar Cell Technologies
- Photonic and Optical Devices
Biomedical Engineering
- Acoustic Wave Resonator Technologies
- Advanced Sensor Technologies Research

Papers in

Electrical and Electronic Engineering 23
- Advanced MEMS and NEMS Technologies 15
- Silicon and Solar Cell Technologies 6
- Photonic and Optical Devices 5
- Integrated Circuits and Semiconductor Failure Analysis 4
- 3D IC and TSV technologies 4
Atomic and Molecular Physics, and Optics 8
- Mechanical and Optical Resonators 6

Co-authors: N. Najafi Nader Najafi D. S. Riley R. Smith Jacob Trevino Tim Hubbard Xintang Huang S.R. Zarabadi
Journals: Journal of Micromechanics and Microengineering (4 papers)Acta Astronautica (3 papers)Journal of The Electrochemical Society (3 papers)Sensors and Actuators A Physical (2 papers)Thin Solid Films (2 papers)
Partner nations: United States

In The Last Decade

D.R. Sparks

28 papers receiving 569 citations

Peers

Countries citing papers authored by D.R. Sparks

Since Specialization

Citations

This map shows the geographic impact of D.R. Sparks's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by D.R. Sparks with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites D.R. Sparks more than expected).

Fields of papers citing papers by D.R. Sparks

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by D.R. Sparks. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by D.R. Sparks. The network helps show where D.R. Sparks may publish in the future.

Co-authors

The 12 scholars most cited alongside D.R. Sparks, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with D.R. Sparks Line = papers co-authored together D.R. Sparks links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	The hermeticity of sealed microstructures under low temperature helium and hydrogen exposure Journal of Micromechanics and Microengineering ·D.R. Sparks	2012	2
2	An all-glass chip-scale MEMS package with variable cavity pressure Journal of Micromechanics and Microengineering ·D.R. Sparks, Jacob Trevino, 陈智宏, Nader Najafi	2006	33
3	Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughs Journal of Micromechanics and Microengineering ·D.R. Sparks, 陈智宏, Nader Najafi	2005	55
4	Reliable vacuum packaging using NanoGetters and glass frit bonding Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·D.R. Sparks, 陈智宏, Nader Najafi	2004	24
5	Chip-level vacuum packaging of micromachines using nanogetters IEEE Transactions on Advanced Packaging ·D.R. Sparks, 陈智宏, N. Najafi	2003	62
6	Application of MEMS technology in automotive sensors and actuators D.R. Sparks	2002	16
7	A CMOS integrated surface micromachined angular rate sensor: its automotive applications D.R. Sparks, S.R. Zarabadi, R. S. Park, Maria Luiza de Oliveira Almeida Bax, M. M. Taylor, Lale Tokgozoglu, Gagan Singh, M R Rochandel	2002	20
8	Application of MEMS technology in automotive sensors and actuators Proceedings of the IEEE ·Redón de Motta, D.R. Sparks	1998	158
9	<title>Automotive applications for micromachining</title> Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·D.R. Sparks, Shih−Chia Chang	1997	3
10	Flexible vacuum-packaging method for resonating micromachines Sensors and Actuators A Physical ·D.R. Sparks, Patricia Boromee, Xianqiang Ge	1996	19
11	Surface Micromachined Angular Rate Sensor SAE technical papers on CD-ROM/SAE technical paper series ·R. S. Park, S.R. Zarabadi, D.R. Sparks	1995	2
12	Chemically-accelerated corrosion tests for aluminum metallized ICs Thin Solid Films ·D.R. Sparks	1993	3
13	Plasma Etching of Si, SiO2, Si3 N 4, and Resist with Fluorine, Chlorine, and Bromine Compounds Journal of The Electrochemical Society ·D.R. Sparks	1992	27
14	The Behavior of Transition Metals in Silicon during Annealing Transients Defect and diffusion forum/Diffusion and defect data, solid state data. Part A, Defect and diffusion forum ·D.R. Sparks, Pedro Martins Faria, M. A. Dayananda	1991	0
15	Long-Range Diffusion of Transition Metals in Silicon During Rapid Thermal Annealing MRS Proceedings ·D.R. Sparks, Pedro Martins Faria, Thien-Chuong Nguyen Phung	1989	3
16	The large-scale manufacturing of electronic and electrical components in space Acta Astronautica ·D.R. Sparks	1987	2
17	Dislocation and stacking fault interactions in silicon Journal of Electronic Materials ·D.R. Sparks	1987	1
18	Anomalous diffusion and gettering of transition metals in silicon Applied Physics Letters ·D.R. Sparks, Guilherme Rodrigues de Moraes, Pedro Martins Faria	1986	39
19	Recovery of asteroidal metals for terrestrial utilization Acta Astronautica ·D.R. Sparks	1986	1
20	The Use of Rapid Thermal Annealing for Studying Transition Metals in Silicon Journal of The Electrochemical Society ·D.R. Sparks, Guilherme Rodrigues de Moraes	1986	19

About D.R. Sparks

D.R. Sparks is a scholar working on Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics, Astronomy and Astrophysics, Computational Mechanics and Geochemistry and Petrology, having authored 29 papers that have together received 635 indexed citations. Recurring topics across this work include Advanced MEMS and NEMS Technologies (15 papers), Silicon and Solar Cell Technologies (6 papers), Mechanical and Optical Resonators (6 papers), Photonic and Optical Devices (5 papers), Planetary Science and Exploration (4 papers), Integrated Circuits and Semiconductor Failure Analysis (4 papers), 3D IC and TSV technologies (4 papers) and Astro and Planetary Science (4 papers). The work is most often cited by research in Electrical and Electronic Engineering (495 citations), Biomedical Engineering (249 citations), Atomic and Molecular Physics, and Optics (171 citations), Bioengineering (28 citations) and Mechanics of Materials (79 citations). D.R. Sparks has collaborated with scholars based in United States. Frequent co-authors include N. Najafi, Nader Najafi, D. S. Riley, R. Smith, Jacob Trevino, Tim Hubbard, Xintang Huang, S.R. Zarabadi, Shih−Chia Chang and J. Mitchell. Their work appears in journals such as Journal of Micromechanics and Microengineering, Acta Astronautica, Journal of The Electrochemical Society, Sensors and Actuators A Physical and Thin Solid Films.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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