Andrew S. Cavanagh

5.8k total citations · 2 hit papers
65 papers, 5.2k citations indexed

About

Andrew S. Cavanagh is a scholar working on Electrical and Electronic Engineering, Materials Chemistry and Electronic, Optical and Magnetic Materials. According to data from OpenAlex, Andrew S. Cavanagh has authored 65 papers receiving a total of 5.2k indexed citations (citations by other indexed papers that have themselves been cited), including 57 papers in Electrical and Electronic Engineering, 34 papers in Materials Chemistry and 18 papers in Electronic, Optical and Magnetic Materials. Recurrent topics in Andrew S. Cavanagh's work include Semiconductor materials and devices (49 papers), Electronic and Structural Properties of Oxides (23 papers) and Advancements in Battery Materials (19 papers). Andrew S. Cavanagh is often cited by papers focused on Semiconductor materials and devices (49 papers), Electronic and Structural Properties of Oxides (23 papers) and Advancements in Battery Materials (19 papers). Andrew S. Cavanagh collaborates with scholars based in United States, South Korea and Australia. Andrew S. Cavanagh's co-authors include Steven M. George, Anne C. Dillon, Yoon Seok Jung, Yanfa Yan, Se‐Hee Lee, Markus D. Groner, Leah Riley, Dragos Seghete, Se-Hee Lee and Gi‐Heon Kim and has published in prestigious journals such as Advanced Materials, Nano Letters and Journal of Applied Physics.

In The Last Decade

Andrew S. Cavanagh

63 papers receiving 5.1k citations

Hit Papers

align trajectories

What are hit papers?

Hit papers significantly outperform the citation benchmark for their cohort. A paper qualifies if it has ≥500 total citations, achieves ≥1.5× the top-1% citation threshold for papers in the same subfield and year (this is the minimum needed to enter the top 1%, not the average within it), or reaches the top citation threshold in at least one of its specific research topics.

Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries

2010 500 citations Yoon Seok Jung, Andrew S. Cavanagh et al. profile →
Effect of Al₂O₃ Coating on Stabilizing LiNi_0.4Mn_0.4Co_0.2O₂ Cathodes

2015 202 citations Andrew S. Cavanagh, Steven M. George et al. Chemistry of Materials profile →

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name	h						Papers	Cites
Andrew S. Cavanagh United States	35	4.6k	1.9k	1.3k	1.0k	322	65	5.2k
Loïc Baggetto United States	41	4.8k 1.0×	1.1k 0.6×	1.4k 1.1×	1.6k 1.6×	644 2.0×	68	5.4k
Susumu Tsukimoto Japan	28	3.0k 0.7×	1.7k 0.9×	1.4k 1.1×	406 0.4×	534 1.7×	93	4.2k
Lydia Laffont France	36	3.4k 0.7×	1.5k 0.8×	914 0.7×	1.1k 1.1×	1.3k 4.0×	101	5.1k
Ruimin Qiao United States	33	4.2k 0.9×	994 0.5×	1.3k 1.0×	1.2k 1.2×	529 1.6×	49	4.8k
Xiaoke Mu Germany	31	2.7k 0.6×	1.7k 0.9×	1.3k 1.0×	287 0.3×	710 2.2×	75	3.9k
Seung‐Wan Song South Korea	43	4.2k 0.9×	789 0.4×	1.1k 0.8×	1.9k 1.9×	474 1.5×	126	4.8k
Chunjoong Kim South Korea	45	5.7k 1.2×	2.6k 1.3×	1.5k 1.2×	1.3k 1.3×	572 1.8×	158	6.8k
Mehmet Kadri Aydınol Türkiye	22	3.2k 0.7×	1.6k 0.8×	694 0.5×	715 0.7×	668 2.1×	44	4.1k
Urmimala Maitra India	31	3.3k 0.7×	3.0k 1.5×	1.1k 0.8×	481 0.5×	410 1.3×	45	5.5k
Rachid Yazami France	45	5.9k 1.3×	1.4k 0.8×	1.5k 1.2×	2.4k 2.4×	1.1k 3.3×	140	6.6k

Countries citing papers authored by Andrew S. Cavanagh

Since Specialization

Citations

This map shows the geographic impact of Andrew S. Cavanagh's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Andrew S. Cavanagh with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Andrew S. Cavanagh more than expected).

Fields of papers citing papers by Andrew S. Cavanagh

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Andrew S. Cavanagh. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Andrew S. Cavanagh. The network helps show where Andrew S. Cavanagh may publish in the future.

Co-authorship network of co-authors of Andrew S. Cavanagh

This figure shows the co-authorship network connecting the top 25 collaborators of Andrew S. Cavanagh. A scholar is included among the top collaborators of Andrew S. Cavanagh based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Andrew S. Cavanagh. Andrew S. Cavanagh is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

Абдулагатов, А. И., et al.. (2025). Thermal Atomic Layer Etching of Indium Gallium Zinc Oxide (IGZO), In ₂ O ₃ , Ga ₂ O ₃ , and ZnO Using Sequential Hydrogen Fluoride and Acetylacetone Exposures. The Journal of Physical Chemistry C. 129(45). 20223–20233.

Cavanagh, Andrew S., et al.. (2025). Strongly and Weakly Adsorbed H₂O Layer Thicknesses on Hydroxylated SiO₂ Surfaces versus H₂O Pressure at Various Substrate Temperatures. The Journal of Physical Chemistry C. 129(3). 1666–1677. 1 indexed citations

Cavanagh, Andrew S., et al.. (2025). Electron-Enhanced Deposition of Titanium-, Silicon- and Tungsten-Containing Films at Low Temperatures Using Volatile Precursors with Various Reactive Background Gases. Chemistry of Materials. 37(13). 4652–4664.

Абдулагатов, А. И., et al.. (2025). Mechanism of Thermal Atomic Layer Etching of Hafnium Zirconium Oxide, HfO₂ and ZrO₂ Using Sequential HF and Acetylacetone Exposures. Chemistry of Materials. 37(15). 5935–5945. 1 indexed citations

Johnson, Virginia L., et al.. (2024). Thermal Atomic Layer Etching of Gold Using Sulfuryl Chloride for Chlorination and Triethylphosphine for Ligand Addition. Chemistry of Materials. 36(10). 5149–5159. 2 indexed citations

Nam, Taewook, et al.. (2024). Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 42(6). 1 indexed citations

Nam, Taewook, et al.. (2024). Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions. Chemistry of Materials. 36(3). 1449–1458. 4 indexed citations

Cavanagh, Andrew S., et al.. (2023). Electron-enhanced SiO2 atomic layer deposition at 35 °C using disilane and ozone or water as reactants. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 41(4). 4 indexed citations

Johnson, Virginia L., Andrew S. Cavanagh, Andreas Fischer, et al.. (2023). Thermal Atomic Layer Etching of CoO, ZnO, Fe₂O₃, and NiO by Chlorination and Ligand Addition Using SO₂Cl₂ and Tetramethylethylenediamine. Chemistry of Materials. 35(5). 2058–2068. 15 indexed citations

10.

Cavanagh, Andrew S., et al.. (2023). Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 41(6). 3 indexed citations

11.

Lii-Rosales, Ann, Virginia L. Johnson, Andrew S. Cavanagh, et al.. (2022). Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides. Chemistry of Materials. 34(19). 8641–8653. 6 indexed citations

12.

Mahuli, Neha, Andrew S. Cavanagh, & Steven M. George. (2021). Atomic layer deposition of hafnium and zirconium oxyfluoride thin films. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 39(2). 6 indexed citations

13.

Cavanagh, Andrew S., et al.. (2021). Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 39(4). 10 indexed citations

14.

Абдулагатов, А. И., et al.. (2021). Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 39(2). 20 indexed citations

15.

Lii-Rosales, Ann, Andrew S. Cavanagh, Andreas Fischer, Thorsten Lill, & Steven M. George. (2021). Spontaneous Etching of Metal Fluorides Using Ligand-Exchange Reactions: Landscape Revealed by Mass Spectrometry. Chemistry of Materials. 33(19). 7719–7730. 27 indexed citations

16.

Young, Matthias J., Nicholas M. Bedford, Ángel Yanguas-Gil, et al.. (2020). Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition. ACS Applied Materials & Interfaces. 12(20). 22804–22814. 36 indexed citations

17.

Mahuli, Neha, Andrew S. Cavanagh, & Steven M. George. (2020). Atomic layer deposition of aluminum oxyfluoride thin films with tunable stoichiometry. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 38(2). 9 indexed citations

18.

Cavanagh, Andrew S., et al.. (2010). Enhanced Stability of LiCoO₂Cathodes in Lithium-ion Batteries Using Surface Modification by Atomic Layer Deposition. Journal of the Korean Ceramic Society. 47(1). 61–65. 13 indexed citations

19.

Riley, Leah, Andrew S. Cavanagh, Steven M. George, et al.. (2010). Conformal Surface Coatings to Enable High Volume Expansion Li‐Ion Anode Materials. ChemPhysChem. 11(10). 2124–2130. 122 indexed citations

20.

King, David M., Xiaohua Du, Andrew S. Cavanagh, & Alan W. Weimer. (2008). Quantum confinement in amorphous TiO₂films studied via atomic layer deposition. Nanotechnology. 19(44). 445401–445401. 68 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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