Andrew S. Cavanagh

5.8k citations

65 papers · 5.2k indexed · 2 hit papers · h-index 35

Automotive Engineering top 0.5%
Electrical and Electronic Engineering top 0.5%
- Semiconductor materials and devices 49
- Advancements in Battery Materials 19
- Advanced Battery Materials and Technologies 7
Electronic, Optical and Magnetic Materials top 2%
- Supercapacitor Materials and Fabrication 9
- Copper Interconnects and Reliability 6
Materials Chemistry top 2%
- Electronic and Structural Properties of Oxides 23
- ZnO doping and properties 10
- Catalytic Processes in Materials Science 7
Renewable Energy, Sustainability and the Environment top 5%

Co-authors: Steven M. George Anne C. Dillon Yoon Seok Jung Yanfa Yan Se‐Hee Lee Markus D. Groner Leah Riley Dragos Seghete
Cited by: Automotive Engineering Electrical and Electronic Engineering Electronic, Optical and Magnetic Materials
Partner nations: United States South Korea Australia

In The Last Decade

Andrew S. Cavanagh

63 papers receiving 5.1k citations

Hit Papers

align trajectories log scale

What are hit papers?

Hit papers significantly outperform the citation benchmark for their cohort. A paper qualifies if it has ≥500 total citations, achieves ≥1.5× the top-1% citation threshold for papers in the same subfield and year (this is the minimum needed to enter the top 1%, not the average within it), or reaches the top citation threshold in at least one of its specific research topics.

2015 Effect of Al₂O₃ Coating on Stabilizing LiNi_0.4Mn_0.4Co_0.2O₂ Cathodes
2010 Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries

Peers

Countries citing papers authored by Andrew S. Cavanagh

Since Specialization

Citations

This map shows the geographic impact of Andrew S. Cavanagh's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Andrew S. Cavanagh with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Andrew S. Cavanagh more than expected).

Fields of papers citing papers by Andrew S. Cavanagh

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Andrew S. Cavanagh. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Andrew S. Cavanagh. The network helps show where Andrew S. Cavanagh may publish in the future.

Co-authorship network

The 25 scholars most cited alongside Andrew S. Cavanagh, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Andrew S. Cavanagh Line = papers co-authored together Andrew S. Cavanagh links everyone, so they are left out of the graph.

All Works

Sort: Min cites: Since: Top N: Style:

20 of 20 papers shown

#	Work
1	Thermal Atomic Layer Etching of Indium Gallium Zinc Oxide (IGZO), In ₂ O ₃ , Ga ₂ O ₃ , and ZnO Using Sequential Hydrogen Fluoride and Acetylacetone Exposures Troy A. Colleran,А. И. Абдулагатов,Jonathan L. Partridge,Andrew S. Cavanagh,Steven M. George	2025	0
2	Strongly and Weakly Adsorbed H₂O Layer Thicknesses on Hydroxylated SiO₂ Surfaces versus H₂O Pressure at Various Substrate Temperatures S. Râu,Rebecca J. Hirsch,Marcel Junige,Andrew S. Cavanagh,Antonio Rotondaro,Hanna Paddubrouskaya,K.H. Abel,Steven M. George	2025	1
3	Electron-Enhanced Deposition of Titanium-, Silicon- and Tungsten-Containing Films at Low Temperatures Using Volatile Precursors with Various Reactive Background Gases Zachary C. Sobell,Andrew S. Cavanagh,Steven M. George	2025	0
4	Mechanism of Thermal Atomic Layer Etching of Hafnium Zirconium Oxide, HfO₂ and ZrO₂ Using Sequential HF and Acetylacetone Exposures Troy A. Colleran,А. И. Абдулагатов,Jonathan L. Partridge,Andrew S. Cavanagh,Steven M. George	2025	1
5	Thermal Atomic Layer Etching of Gold Using Sulfuryl Chloride for Chlorination and Triethylphosphine for Ligand Addition Jonathan L. Partridge,Jessica A. Murdzek,Virginia L. Johnson,Andrew S. Cavanagh,Sandeep Sharma,Steven M. George	2024	2
6	Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching Ross Edel,Ezra Alexander,Taewook Nam,Andrew S. Cavanagh,Troy Van Voorhis,Steven M. George	2024	1
7	Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions Taewook Nam,Troy A. Colleran,Jonathan L. Partridge,Andrew S. Cavanagh,Steven M. George	2024	4
8	Electron-enhanced SiO2 atomic layer deposition at 35 °C using disilane and ozone or water as reactants Jonas C. Gertsch,Zachary C. Sobell,Andrew S. Cavanagh,Harsono Simka,Steven M. George	2023	4
9	Thermal Atomic Layer Etching of CoO, ZnO, Fe₂O₃, and NiO by Chlorination and Ligand Addition Using SO₂Cl₂ and Tetramethylethylenediamine Jonathan L. Partridge,Jessica A. Murdzek,Virginia L. Johnson,Andrew S. Cavanagh,Andreas Fischer,Thorsten Lill,Sandeep Sharma,Steven M. George	2023	15
10	Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal Michael A. Collings,Marcel Junige,Andrew S. Cavanagh,Victor Wang,Andrew C. Kummel,Steven M. George	2023	3
11	Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides Ann Lii-Rosales,Virginia L. Johnson,Andrew S. Cavanagh,Andreas Fischer,Thorsten Lill,Sandeep Sharma,Steven M. George	2022	6
12	Atomic layer deposition of hafnium and zirconium oxyfluoride thin films Neha Mahuli,Andrew S. Cavanagh,Steven M. George	2021	6
13	Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition Zachary C. Sobell,Andrew S. Cavanagh,David R. Boris,Scott G. Walton,Steven M. George	2021	10
14	Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism А. И. Абдулагатов,Varun Sharma,Jessica A. Murdzek,Andrew S. Cavanagh,Steven M. George	2021	20
15	Spontaneous Etching of Metal Fluorides Using Ligand-Exchange Reactions: Landscape Revealed by Mass Spectrometry Ann Lii-Rosales,Andrew S. Cavanagh,Andreas Fischer,Thorsten Lill,Steven M. George	2021	27
16	Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition Matthias J. Young,Nicholas M. Bedford,Ángel Yanguas-Gil,Steven Letourneau,Matthew Coile,David J. Mandia,Bachir Aoun,Andrew S. Cavanagh,Steven M. George,Jeffrey W. Elam	2020	36
17	Atomic layer deposition of aluminum oxyfluoride thin films with tunable stoichiometry Neha Mahuli,Andrew S. Cavanagh,Steven M. George	2020	9
18	Enhanced Stability of LiCoO₂Cathodes in Lithium-ion Batteries Using Surface Modification by Atomic Layer Deposition Yoon-S. Jung,Andrew S. Cavanagh,Anne C. Dillon,Markus D. Groner,Steven M. George,Se-Hee Lee	2010	13
19	Conformal Surface Coatings to Enable High Volume Expansion Li‐Ion Anode Materials Leah Riley,Andrew S. Cavanagh,Steven M. George,Yoon Seok Jung,Yanfa Yan,Se‐Hee Lee,Anne C. Dillon	2010	122
20	Quantum confinement in amorphous TiO₂films studied via atomic layer deposition David M. King,Xiaohua Du,Andrew S. Cavanagh,Alan W. Weimer	2008	68

About Andrew S. Cavanagh

Andrew S. Cavanagh is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Materials Chemistry, having authored 65 papers that have together received 5.2k indexed citations. Recurring topics across this work include Semiconductor materials and devices (49 papers), Electronic and Structural Properties of Oxides (23 papers), Advancements in Battery Materials (19 papers), ZnO doping and properties (10 papers), Supercapacitor Materials and Fabrication (9 papers), Catalytic Processes in Materials Science (7 papers), Advanced Battery Materials and Technologies (7 papers) and Copper Interconnects and Reliability (6 papers). The work is most often cited by research in Automotive Engineering (1.0k citations), Electrical and Electronic Engineering (4.6k citations) and Electronic, Optical and Magnetic Materials (1.3k citations). Andrew S. Cavanagh has collaborated with scholars based in United States, South Korea and Australia. Frequent co-authors include Steven M. George, Anne C. Dillon, Yoon Seok Jung, Yanfa Yan, Se‐Hee Lee, Markus D. Groner, Leah Riley, Dragos Seghete, Se-Hee Lee and Gi‐Heon Kim.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

Explore authors with similar magnitude of impact