Citation Impact

5 standout
Sub-graph 1 of 3

Citing Papers

Ultra-low-loss on-chip resonators with sub-milliwatt parametric oscillation threshold
2017 Standout
Overview of atomic layer etching in the semiconductor industry
2015 Standout
2 intermediate papers

Works of P. Charvát being referenced

Near-surface residue formation in CF4/H2 reactive ion etching of silicon
1992
Near surface contamination of silicon during reactive ion beam etching with chlorine
1986

Author Peers

Author Computational Mechanics EEE Radiation MM Last Decade Papers Cites
P. Charvát 4 17 9 3 17
Ludmila Costhek Abílio 17 190
Bae-Jin Lee 1 25 658
David F. Austin 9 579
Hong Wen Jiang 4 319 6 3 646
Viterbo Rodríguez 1 10 573

All Works

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2026