スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

1.7k indexed citations

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This paper, published in 1969, received 1.7k indexed citations. Written by Peter Sigmund covering the research area of . It is primarily cited by scholars working on Computational Mechanics (1.4k citations), Materials Chemistry (783 citations) and Electrical and Electronic Engineering (752 citations). Published in Physical Review D.

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Countries where authors are citing スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

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Fields of papers citing スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

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Physical SciencesHealth SciencesLife SciencesSocial Sciences

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This paper is also available at doi.org/w4417862.

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