Low-Temperature Al2O3 Atomic Layer Deposition

Abstract

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About

This paper, published in 1950, received 1.2k indexed citations. Written by Markus D. Groner, F. Fabreguette, Jeffrey W. Elam and Steven M. George covering the research area of Materials Chemistry, Electrical and Electronic Engineering and Condensed Matter Physics. It is primarily cited by scholars working on Electrical and Electronic Engineering (1000 citations), Materials Chemistry (776 citations) and Electronic, Optical and Magnetic Materials (168 citations). Published in Chemistry of Materials.

Countries where authors are citing Low-Temperature Al2O3 Atomic Layer Deposition

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This map shows the geographic impact of Low-Temperature Al2O3 Atomic Layer Deposition. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Low-Temperature Al2O3 Atomic Layer Deposition with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Low-Temperature Al2O3 Atomic Layer Deposition more than expected).

Fields of papers citing Low-Temperature Al2O3 Atomic Layer Deposition

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Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of Low-Temperature Al2O3 Atomic Layer Deposition. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the Low-Temperature Al2O3 Atomic Layer Deposition.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

This paper is also available at doi.org/10.1021/cm0304546.

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