R. Legtenberg

3.7k total citations · 3 hit papers
35 papers, 2.8k citations indexed

About

R. Legtenberg is a scholar working on Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics and Biomedical Engineering. According to data from OpenAlex, R. Legtenberg has authored 35 papers receiving a total of 2.8k indexed citations (citations by other indexed papers that have themselves been cited), including 31 papers in Electrical and Electronic Engineering, 12 papers in Atomic and Molecular Physics, and Optics and 9 papers in Biomedical Engineering. Recurrent topics in R. Legtenberg's work include Advanced MEMS and NEMS Technologies (22 papers), Mechanical and Optical Resonators (12 papers) and Acoustic Wave Resonator Technologies (6 papers). R. Legtenberg is often cited by papers focused on Advanced MEMS and NEMS Technologies (22 papers), Mechanical and Optical Resonators (12 papers) and Acoustic Wave Resonator Technologies (6 papers). R. Legtenberg collaborates with scholars based in Netherlands, United States and Belgium. R. Legtenberg's co-authors include M. Elwenspoek, H.A.C. Tilmans, Henri Jansen, M. de Boer, Niels R. Tas, S.D. Senturia, M. Elwenspoek, James Gilbert, S. Bouwstra and J. Elders and has published in prestigious journals such as Journal of The Electrochemical Society, Sensors and Actuators A Physical and IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control.

In The Last Decade

R. Legtenberg

34 papers receiving 2.7k citations

Hit Papers

align trajectories

What are hit papers?

Hit papers significantly outperform the citation benchmark for their cohort. A paper qualifies if it has ≥500 total citations, achieves ≥1.5× the top-1% citation threshold for papers in the same subfield and year (this is the minimum needed to enter the top 1%, not the average within it), or reaches the top citation threshold in at least one of its specific research topics.

Comb-drive actuators for large displacements

1996 454 citations R. Legtenberg, M. Elwenspoek et al. Journal of Micromechanics and Microengineering profile →
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

1995 449 citations Henri Jansen, M. de Boer et al. Journal of Micromechanics and Microengineering profile →
Stiction in surface micromachining

1996 421 citations Henri Jansen, R. Legtenberg et al. Journal of Micromechanics and Microengineering profile →

Peers

R. Legtenberg

EEE

AMPO

BE

MC

MM

R. Stutz Switzerland

Susumu Sugiyama Japan

S. C. Minne United States

H.A.C. Tilmans Belgium

P.J. French Netherlands

J.H.J. Fluitman Netherlands

S. Bouwstra Denmark

Shiyang Zhu Singapore

Alain Bosseboeuf France

J. J. Wortman United States

R. Stutz Switzerland

R. Legtenberg

1.2k ×0.5

EEE

1.3k ×0.9

AMPO

1.4k ×1.1

BE

476 ×1.1

MC

239 ×0.6

MM

Citations per year, relative to R. Legtenberg R. Legtenberg (= 1×) peers R. Stutz

Countries citing papers authored by R. Legtenberg

Since Specialization

Citations

This map shows the geographic impact of R. Legtenberg's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by R. Legtenberg with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites R. Legtenberg more than expected).

Fields of papers citing papers by R. Legtenberg

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by R. Legtenberg. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by R. Legtenberg. The network helps show where R. Legtenberg may publish in the future.

Co-authorship network of co-authors of R. Legtenberg

This figure shows the co-authorship network connecting the top 25 collaborators of R. Legtenberg. A scholar is included among the top collaborators of R. Legtenberg based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with R. Legtenberg. R. Legtenberg is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

Sort: Min cites: Since: Top N: Style:

20 of 20 papers shown

1.

Legtenberg, R., et al.. (2018). Method to determine thermoelastic material properties of constituent and copper-patterned layers of multilayer printed circuit boards. Journal of Materials Science Materials in Electronics. 29(6). 4900–4914. 21 indexed citations

2.

Wits, Wessel W., et al.. (2013). Modeling Printed Circuit Board Curvature in Relation to Manufacturing Process Steps. Procedia CIRP. 9. 55–60. 8 indexed citations

3.

Wits, Wessel W., et al.. (2008). Novel cooling strategy for electronic packages: Directly injected cooling. CIRP journal of manufacturing science and technology. 1(3). 142–147. 11 indexed citations

4.

Legtenberg, R., Erwin Berenschot, Jeroen van Baar, T.S.J. Lammerink, & M. Elwenspoek. (2005). An Electrostatic Lower, Stator Axial Gap Wobble Motor: Design And Fabrication. Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. 2. 404–407.

5.

Gilbert, John R., R. Legtenberg, & S.D. Senturia. (2005). 3D coupled electro-mechanics for MEMS: applications of CoSolve-EM. University of Twente Research Information. 122–122. 36 indexed citations

6.

Legtenberg, R., et al.. (2005). Static And Dynamic Properties Of Active Joints. Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. 2. 412–415. 5 indexed citations

7.

Legtenberg, R., Erwin Berenschot, Michael Curt Elwenspoek, & J.H.J. Fluitman. (2005). Electrostatic curved electrode actuators. 37–37. 8 indexed citations

8.

Legtenberg, R., Erwin Berenschot, M. Elwenspoek, & J.H.J. Fluitman. (2002). Electrostatic microactuators with integrated gear linkages for mechanical power transmission. University of Twente Research Information. a21 a23. 204–209. 4 indexed citations

9.

Legtenberg, R., James Gilbert, S.D. Senturia, & M. Elwenspoek. (1997). Electrostatic curved electrode actuators. Journal of Microelectromechanical Systems. 6(3). 257–265. 196 indexed citations

10.

Elwenspoek, Michael Curt, et al.. (1995). Properties of active joints. University of Twente Research Information. 1 indexed citations

11.

Legtenberg, R., Henri Jansen, M. de Boer, & M. Elwenspoek. (1995). Anisotropic Reactive Ion Etching of Silicon Using SF 6 / O 2 / CHF 3 Gas Mixtures. Journal of The Electrochemical Society. 142(6). 2020–2028. 127 indexed citations

12.

Bouwstra, S. & R. Legtenberg. (1994). Response of resonating microbridge Mass Flow sensor. Sensors and Materials. 1994(1). 1–26. 4 indexed citations

13.

Legtenberg, R. & H.A.C. Tilmans. (1994). Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication. Sensors and Actuators A Physical. 45(1). 57–66. 166 indexed citations

14.

Tilmans, H.A.C. & R. Legtenberg. (1994). Electrostatically driven vacuum-encapsulated polysilicon resonators. Sensors and Actuators A Physical. 45(1). 67–84. 339 indexed citations

15.

Legtenberg, R., H.A.C. Tilmans, J. Elders, & M. Elwenspoek. (1994). Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and Actuators A Physical. 43(1-3). 230–238. 154 indexed citations

16.

Legtenberg, R., S. Bouwstra, & J.H.J. Fluitman. (1991). Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and Actuators A Physical. 27(1-3). 723–727. 11 indexed citations

17.

Legtenberg, R., S. Bouwstra, & Michael Curt Elwenspoek. (1991). Low-temperature glass bonding for sensor application using boron oxide thin films. Journal of Micromechanics and Microengineering. 1(3). 157–160. 10 indexed citations

18.

Legtenberg, R., S. Bouwstra, & Michael Curt Elwenspoek. (1990). Low-Temperature Glass Bonding for Sensor Applications. Journal of Micromechanics and Microengineering. 157–160. 4 indexed citations

19.

Bouwstra, S., R. Legtenberg, H.A.C. Tilmans, & M. Elwenspoek. (1990). Resonating microbridge mass flow sensor. Sensors and Actuators A Physical. 21(1-3). 332–335. 79 indexed citations

20.

Bouwstra, S., et al.. (1989). Thermally Excited Resonating Membrane Mass Flow Sensor. Sensors and Actuators. 20(3). 213–223. 30 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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