M. Elwenspoek

11.0k total citations · 3 hit papers
239 papers, 7.9k citations indexed

About

M. Elwenspoek is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering and Atomic and Molecular Physics, and Optics. According to data from OpenAlex, M. Elwenspoek has authored 239 papers receiving a total of 7.9k indexed citations (citations by other indexed papers that have themselves been cited), including 159 papers in Electrical and Electronic Engineering, 135 papers in Biomedical Engineering and 63 papers in Atomic and Molecular Physics, and Optics. Recurrent topics in M. Elwenspoek's work include Advanced MEMS and NEMS Technologies (99 papers), Mechanical and Optical Resonators (40 papers) and Microfluidic and Capillary Electrophoresis Applications (34 papers). M. Elwenspoek is often cited by papers focused on Advanced MEMS and NEMS Technologies (99 papers), Mechanical and Optical Resonators (40 papers) and Microfluidic and Capillary Electrophoresis Applications (34 papers). M. Elwenspoek collaborates with scholars based in Netherlands, Germany and Japan. M. Elwenspoek's co-authors include Henri Jansen, R. Legtenberg, J.H.J. Fluitman, Niels R. Tas, M. de Boer, Erwin Berenschot, Remco J. Wiegerink, Han Gardeniers, T.S.J. Lammerink and H.A.C. Tilmans and has published in prestigious journals such as SHILAP Revista de lepidopterología, Nano Letters and Physical review. B, Condensed matter.

In The Last Decade

M. Elwenspoek

231 papers receiving 7.5k citations

Hit Papers

align trajectories

What are hit papers?

Hit papers significantly outperform the citation benchmark for their cohort. A paper qualifies if it has ≥500 total citations, achieves ≥1.5× the top-1% citation threshold for papers in the same subfield and year (this is the minimum needed to enter the top 1%, not the average within it), or reaches the top citation threshold in at least one of its specific research topics.

Comb-drive actuators for large displacements

1996 454 citations R. Legtenberg, M. Elwenspoek et al. Journal of Micromechanics and Microengineering profile →
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

1995 449 citations Henri Jansen, M. de Boer et al. Journal of Micromechanics and Microengineering profile →
Stiction in surface micromachining

1996 421 citations Niels R. Tas, Henri Jansen et al. Journal of Micromechanics and Microengineering profile →

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name	h						Papers	Cites
M. Elwenspoek Netherlands	44	4.7k	4.5k	2.2k	1.4k	867	239	7.9k
Henri Jansen Netherlands	36	3.1k 0.7×	3.1k 0.7×	1.1k 0.5×	1.1k 0.8×	522 0.6×	145	5.4k
S.D. Senturia United States	49	6.2k 1.3×	3.2k 0.7×	4.1k 1.9×	1.4k 1.0×	1.2k 1.4×	173	9.2k
P.M. Sarro Netherlands	40	4.7k 1.0×	2.9k 0.6×	1.8k 0.8×	1.7k 1.2×	348 0.4×	433	6.9k
H. K. Wickramasinghe United States	42	3.9k 0.8×	4.9k 1.1×	6.2k 2.8×	1.9k 1.4×	1.0k 1.2×	129	9.6k
Martin A. Schmidt United States	50	3.9k 0.8×	5.8k 1.3×	750 0.3×	1.3k 0.9×	404 0.5×	187	9.3k
Mehran Mehregany United States	47	5.9k 1.3×	3.0k 0.7×	3.1k 1.4×	1.8k 1.3×	1.4k 1.7×	287	8.2k
T. R. Albrecht United States	29	2.6k 0.6×	2.6k 0.6×	5.1k 2.4×	2.2k 1.6×	459 0.5×	63	7.7k
K. Petersen Denmark	30	3.8k 0.8×	2.5k 0.6×	2.0k 0.9×	902 0.6×	815 0.9×	101	5.4k
Roger T. Howe United States	65	11.6k 2.5×	7.1k 1.6×	7.1k 3.3×	2.3k 1.7×	1.6k 1.9×	370	15.8k
G. M. Sessler Germany	48	2.8k 0.6×	4.6k 1.0×	489 0.2×	3.7k 2.6×	532 0.6×	242	7.6k

Countries citing papers authored by M. Elwenspoek

Since Specialization

Citations

This map shows the geographic impact of M. Elwenspoek's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by M. Elwenspoek with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites M. Elwenspoek more than expected).

Fields of papers citing papers by M. Elwenspoek

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by M. Elwenspoek. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by M. Elwenspoek. The network helps show where M. Elwenspoek may publish in the future.

Co-authorship network of co-authors of M. Elwenspoek

This figure shows the co-authorship network connecting the top 25 collaborators of M. Elwenspoek. A scholar is included among the top collaborators of M. Elwenspoek based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with M. Elwenspoek. M. Elwenspoek is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

Druyvesteyn, W.F., et al.. (2024). A NEW ACOUSTIC MEASUREMENT PROBE: THE MICROFLOWN.

Honschoten, J.W. van, Erwin Berenschot, Thierry Ondarçuhu, et al.. (2010). Elastocapillary fabrication of three-dimensional microstructures. Applied Physics Letters. 97(1). 43 indexed citations

Louwerse, Marcus, Henri Jansen, & M. Elwenspoek. (2010). A modular assembly method of a feed and thruster system for Cubesats. Journal of Micromechanics and Microengineering. 20(11). 115011–115011. 6 indexed citations

Zhao, Yiping, Erwin Berenschot, Henri Jansen, et al.. (2009). Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology. 20(31). 315305–315305. 22 indexed citations

Berenschot, Erwin, Niels R. Tas, Henri Jansen, & M. Elwenspoek. (2008). 3D-nanomachining using corner lithography. University of Twente Research Information. 729–732. 24 indexed citations

Sarajlic, Edin, Erwin Berenschot, Niels R. Tas, et al.. (2006). Fabrication and Characterization of an Electrostatic Contraction Beams Micromotor. University of Twente Research Information. 70. 814–817. 7 indexed citations

Boer, M. de, Henri Jansen, & M. Elwenspoek. (2005). The Black Silicon Method V: A Study Of The Fabricating Of Movable Structures For Micro Electromechanical Systems. Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. 1. 565–568. 11 indexed citations

Legtenberg, R., Erwin Berenschot, Jeroen van Baar, T.S.J. Lammerink, & M. Elwenspoek. (2005). An Electrostatic Lower, Stator Axial Gap Wobble Motor: Design And Fabrication. Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. 2. 404–407.

Lammerink, T.S.J., Niels R. Tas, Erwin Berenschot, M. Elwenspoek, & J.H.J. Fluitman. (2005). Micromachined hydraulic astable multivibrator. University of Twente Research Information. 13–13. 6 indexed citations

10.

Deladi, S., M. Elwenspoek, & Gijs Krijnen. (2003). FEM Assisted Design of Novel Electrothermal Actuators. TechConnect Briefs. 1(2003). 400–403. 1 indexed citations

11.

Regtien, Paul P.L., et al.. (2003). Heat transfer in a MEMS for microfluidics. Sensors and Actuators A Physical. 105(2). 137–149. 27 indexed citations

12.

Veenendaal, E. van, J. van Suchtelen, H. M. Cuppen, et al.. (2001). Monte Carlo simulation of wet chemical etching of silicon. Sensors and Materials. 13(6). 343–350. 1 indexed citations

13.

Tong, Hien D., et al.. (2001). Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and Materials. 13(4). 235–246. 7 indexed citations

14.

Wiegerink, Remco J., et al.. (2000). <title>High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution</title>. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 4176. 47–58. 1 indexed citations

15.

Kuiper, S., M. de Boer, C.J.M. van Rijn, et al.. (2000). Wet and dry etching techniques for the release of sub-micrometre perforated membranes. Journal of Micromechanics and Microengineering. 10(2). 171–174. 21 indexed citations

16.

Veenendaal, E. van, A.J. Nijdam, J. van Suchtelen, et al.. (2000). Simulation of anisotropic wet chemical etching using a physical model. Sensors and Actuators A Physical. 84(3). 324–329. 17 indexed citations

17.

Bree, Hans–Elias de, W.F. Druyvesteyn, & M. Elwenspoek. (1999). Realisation and Calibration of a Novel Half Inch P-U Sound Intensity Probe. Journal of the Audio Engineering Society. 16 indexed citations

18.

Gardeniers, Han, M. Elwenspoek, & C. Cobianu. (1994). Texture Variations in Sol-Gel Derived PZT Films on Substrates with Platinum Metallization. MRS Proceedings. 343. 4 indexed citations

19.

Bouwstra, S., R. Legtenberg, H.A.C. Tilmans, & M. Elwenspoek. (1990). Resonating microbridge mass flow sensor. Sensors and Actuators A Physical. 21(1-3). 332–335. 79 indexed citations

20.

Groot, R. de, M. Elwenspoek, & P. Bennema. (1986). Fluid structure and surface roughening. Journal of Crystal Growth. 79(1-3). 817–824. 16 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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