Masamitsu Itoh

449 total citations
45 papers, 364 citations indexed

About

Masamitsu Itoh is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering. According to data from OpenAlex, Masamitsu Itoh has authored 45 papers receiving a total of 364 indexed citations (citations by other indexed papers that have themselves been cited), including 37 papers in Electrical and Electronic Engineering, 15 papers in Surfaces, Coatings and Films and 14 papers in Biomedical Engineering. Recurrent topics in Masamitsu Itoh's work include Advancements in Photolithography Techniques (33 papers), Electron and X-Ray Spectroscopy Techniques (13 papers) and Advanced Surface Polishing Techniques (8 papers). Masamitsu Itoh is often cited by papers focused on Advancements in Photolithography Techniques (33 papers), Electron and X-Ray Spectroscopy Techniques (13 papers) and Advanced Surface Polishing Techniques (8 papers). Masamitsu Itoh collaborates with scholars based in Japan and United States. Masamitsu Itoh's co-authors include Masaru Hori, Hideoki Fukuoka, Hiroshi Akima, Tetsuo Fukunaga, Yasuo Kawakami, Junichi Ushiyama, Hiroaki Kanehisa, Junjiro Kubo, Takashi Satō and Naoya Hayashi and has published in prestigious journals such as Medicine & Science in Sports & Exercise, Japanese Journal of Applied Physics and Acta Orthopaedica Scandinavica.

In The Last Decade

Masamitsu Itoh

38 papers receiving 327 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Masamitsu Itoh Japan 9 210 92 89 77 56 45 364
K. Zawadzki United States 7 640 3.0× 25 0.3× 141 1.6× 8 0.1× 112 2.0× 8 919
Hyunchul Roh South Korea 9 128 0.6× 13 0.1× 39 0.4× 43 0.6× 35 0.6× 12 287
Siegfried Boseck Germany 8 59 0.3× 97 1.1× 129 1.4× 13 0.2× 23 0.4× 24 285
Satoshi Ishizuka Japan 14 240 1.1× 47 0.5× 31 0.3× 4 0.1× 90 1.6× 62 466
Karen Birkelund Denmark 16 389 1.9× 17 0.2× 460 5.2× 15 0.2× 71 1.3× 31 725
Thomas Fricke-Begemann Germany 10 63 0.3× 36 0.4× 112 1.3× 15 0.2× 26 0.5× 25 306
Pierre Campistron France 10 65 0.3× 156 1.7× 120 1.3× 62 0.8× 16 0.3× 29 302
Jean-Numa Gillet Canada 10 92 0.4× 30 0.3× 188 2.1× 29 0.4× 148 2.6× 25 372
Champak Das United States 12 98 0.5× 76 0.8× 367 4.1× 12 0.2× 18 0.3× 22 490
Yoshihiko Suzuki Japan 13 129 0.6× 11 0.1× 111 1.2× 4 0.1× 120 2.1× 47 481

Countries citing papers authored by Masamitsu Itoh

Since Specialization
Citations

This map shows the geographic impact of Masamitsu Itoh's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Masamitsu Itoh with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Masamitsu Itoh more than expected).

Fields of papers citing papers by Masamitsu Itoh

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Masamitsu Itoh. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Masamitsu Itoh. The network helps show where Masamitsu Itoh may publish in the future.

Co-authorship network of co-authors of Masamitsu Itoh

This figure shows the co-authorship network connecting the top 25 collaborators of Masamitsu Itoh. A scholar is included among the top collaborators of Masamitsu Itoh based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Masamitsu Itoh. Masamitsu Itoh is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Saito, Masato, et al.. (2016). High-performance fabrication process for 2xnm hole-NIL template production. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 9985. 99852E–99852E.
2.
Kobayashi, Y., et al.. (2014). High performance mask fabrication process for the next-generation mask production. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 9256. 925608–925608. 18 indexed citations
3.
Tanaka, Yuusuke, et al.. (2011). Overlay accuracy of EUV1 using compensation method for nonflatness of mask. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 7969. 796936–796936. 2 indexed citations
4.
Yamaguchi, Shinji, Takashi Hirano, Masamitsu Itoh, et al.. (2011). Performance of EBeyeM for EUV mask inspection. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 8166. 81662F–81662F. 24 indexed citations
5.
Hirano, Takashi, Shinji Yamaguchi, Masamitsu Itoh, et al.. (2010). Development of EB inspection system EBeyeM for EUV mask. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 7823. 78232C–78232C. 16 indexed citations
6.
Saito, Masato, et al.. (2008). Mask image position correction for double patterning lithography. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 7028. 70280D–70280D. 1 indexed citations
7.
Satõ, Kazuya, et al.. (2008). Influence of pellicle on hyper-NA imaging. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6924. 692451–692451. 2 indexed citations
8.
Itoh, Masamitsu, et al.. (2007). Mask topography effects of hole patterns on hyper-NA lithography. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6607. 66071F–66071F. 3 indexed citations
9.
Satõ, Kazuya, Masamitsu Itoh, & Takashi Satō. (2007). Mask 3D effect on 45-nm imaging using attenuated PSM. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6520. 65201J–65201J. 6 indexed citations
10.
Ikeda, Takahiro, et al.. (2005). Mask pattern quality assurance based on lithography simulation with fine pixel SEM image. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 5992. 59921M–59921M. 3 indexed citations
11.
Akima, Hiroshi, Junichi Ushiyama, Junjiro Kubo, et al.. (2003). Resistance Training during Unweighting Maintains Muscle Size and Function in Human Calf. Medicine & Science in Sports & Exercise. 35(4). 655–662. 74 indexed citations
12.
Sakamoto, Kazuo, et al.. (2003). New development method eliminating the loading and microloading effect. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 5130. 67–67. 4 indexed citations
13.
Nojima, Shigeki, et al.. (2002). Flexible mask specifications. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 4889. 187–187. 2 indexed citations
14.
Inoue, Soichi, et al.. (2002). Desirable reticle flatness from focus deviation standpoint optical lithography. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 4691. 530–530.
15.
Kamikubo, Takashi, et al.. (1997). Proximity effect correction for reticle fabrication. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 3096. 173–173. 3 indexed citations
16.
Itoh, Masamitsu, et al.. (1993). Mask Distortion Analysis for the Fabrication of 1 GBit Dynamic Random Access Memories by X-Ray Lithography. Japanese Journal of Applied Physics. 32(12S). 5947–5947. 5 indexed citations
17.
Itoh, Masamitsu, et al.. (1991). The origin of stress in sputter-deposited tungsten films for x-ray masks. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena. 9(1). 149–153. 84 indexed citations
18.
Itoh, Masamitsu, et al.. (1989). Fabrication of an ultra Low Stress Tungsten Absorber for X-Ray Masks : Lithography Technology :. 3. 85–88. 1 indexed citations
19.
Kariya, Yusei, Masamitsu Itoh, Toshitaka Nakamura, Kazuo Yagi, & Hisashi Kurosawa. (1989). Magnetic resonance imaging and spectroscopy of thigh muscles in cruciate ligament insufficiency. Acta Orthopaedica Scandinavica. 60(3). 322–325. 13 indexed citations
20.
YOSHIZAWA, Kiyoshi, et al.. (1970). On Growth-inhibition againstAspergillus oryzaeNo 40 by the Compound III-3 in Rice Grain. Agricultural and Biological Chemistry. 34(8). 1262–1264. 1 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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