Maria Berdova

481 total citations
15 papers, 315 citations indexed

About

Maria Berdova is a scholar working on Electrical and Electronic Engineering, Mechanics of Materials and Biomedical Engineering. According to data from OpenAlex, Maria Berdova has authored 15 papers receiving a total of 315 indexed citations (citations by other indexed papers that have themselves been cited), including 10 papers in Electrical and Electronic Engineering, 7 papers in Mechanics of Materials and 5 papers in Biomedical Engineering. Recurrent topics in Maria Berdova's work include Semiconductor materials and devices (7 papers), Metal and Thin Film Mechanics (6 papers) and Advanced Surface Polishing Techniques (3 papers). Maria Berdova is often cited by papers focused on Semiconductor materials and devices (7 papers), Metal and Thin Film Mechanics (6 papers) and Advanced Surface Polishing Techniques (3 papers). Maria Berdova collaborates with scholars based in Finland, Italy and Germany. Maria Berdova's co-authors include Sami Franssila, Jari Koskinen, Helena Ronkainen, Lauri Kilpi, Jussi Lyytinen, Xuwen Liu, Riikka L. Puurunen, Oili Ylivaara, Harri Lipsanen and Saima Ali and has published in prestigious journals such as Acta Materialia, Applied Surface Science and RSC Advances.

In The Last Decade

Maria Berdova

15 papers receiving 311 citations

Peers

Maria Berdova

EEE

Jussi Lyytinen Finland

Y. C. Liu Singapore

András Kovács Germany

Tomasz Stapiński Poland

E. Aschauer Austria

Tommi Suni Finland

I. Suni Finland

Joon‐Ho Oh South Korea

Chen Hon Nee Malaysia

Carlo Maragliano Italy

Jussi Lyytinen Finland

Maria Berdova

179 ×0.8

EEE

132 ×0.8

72 ×0.9

62 ×0.9

11 ×0.3

Citations per year, relative to Maria Berdova Maria Berdova (= 1×) peers Jussi Lyytinen

Countries citing papers authored by Maria Berdova

Since Specialization

Citations

This map shows the geographic impact of Maria Berdova's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Maria Berdova with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Maria Berdova more than expected).

Fields of papers citing papers by Maria Berdova

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Maria Berdova. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Maria Berdova. The network helps show where Maria Berdova may publish in the future.

Co-authorship network of co-authors of Maria Berdova

This figure shows the co-authorship network connecting the top 25 collaborators of Maria Berdova. A scholar is included among the top collaborators of Maria Berdova based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Maria Berdova. Maria Berdova is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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15 of 15 papers shown

Berdova, Maria, Claudia Wiemer, Alessio Lamperti, et al.. (2016). Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications. Applied Surface Science. 368. 470–476. 9 indexed citations

Berdova, Maria, Xuwen Liu, Claudia Wiemer, et al.. (2016). Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 34(5). 37 indexed citations

Berdova, Maria. (2015). Micromechanical characterization of ALD thin films. Aaltodoc (Aalto University). 5 indexed citations

Berdova, Maria, Wonjae Kim, Juha Riikonen, et al.. (2014). Exceptionally strong and robust millimeter-scale graphene–alumina composite membranes. Nanotechnology. 25(35). 355701–355701. 5 indexed citations

Liimatainen, Ville, Quan Zhou, Jussi Lyytinen, et al.. (2014). Characterization of nano-coated micro- and nanostructures by pushing. 6. 23–27. 1 indexed citations

Hilden, T. E., Maria Berdova, J. Heino, et al.. (2014). Calibrating an optical scanner for quality assurance of large area radiation detectors. Measurement Science and Technology. 25(11). 115403–115403. 2 indexed citations

Lyytinen, Jussi, Maria Berdova, Petri Hirvonen, et al.. (2014). Interfacial mechanical testing of atomic layer deposited TiO₂ and Al₂O₃ on a silicon substrate by the use of embedded SiO₂ microspheres. RSC Advances. 4(70). 37320–37328. 10 indexed citations

Berdova, Maria, et al.. (2014). Fracture properties of atomic layer deposited aluminum oxide free-standing membranes. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 33(1). 15 indexed citations

Berdova, Maria, Ivan Kassamakov, Lauri Kilpi, et al.. (2013). Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques. Acta Materialia. 66. 370–377. 47 indexed citations

10.

Hilden, T. E., et al.. (2013). Calibration of high-aspect ratio quality control optical scanning system. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 8839. 88390G–88390G. 1 indexed citations

11.

Lyytinen, Jussi, Maria Berdova, Sami Franssila, & Jari Koskinen. (2013). Adhesion testing of atomic layer deposited TiO2 on glass substrate by the use of embedded SiO2 microspheres. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 32(1). 8 indexed citations

12.

Berdova, Maria, Jussi Lyytinen, Kestutis Grigoras, et al.. (2013). Characterization of thin film adhesion by MEMS shaft-loading blister testing. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 31(3). 15 indexed citations

13.

Berdova, Maria, et al.. (2013). Micromanipulation transfer of membrane resonators for circuit optomechanics. Journal of Micromechanics and Microengineering. 23(12). 125024–125024. 1 indexed citations

14.

Ylivaara, Oili, Xuwen Liu, Lauri Kilpi, et al.. (2013). Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion. Thin Solid Films. 552. 124–135. 156 indexed citations

15.

Heikkinen, Ville, et al.. (2012). IR-SWLI for subsurface imaging of large MEMS structures. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 8430. 843018–843018. 3 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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