M. von Arx

796 total citations
17 papers, 588 citations indexed

About

M. von Arx is a scholar working on Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics and Materials Chemistry. According to data from OpenAlex, M. von Arx has authored 17 papers receiving a total of 588 indexed citations (citations by other indexed papers that have themselves been cited), including 16 papers in Electrical and Electronic Engineering, 8 papers in Atomic and Molecular Physics, and Optics and 6 papers in Materials Chemistry. Recurrent topics in M. von Arx's work include Advanced MEMS and NEMS Technologies (8 papers), Mechanical and Optical Resonators (6 papers) and Thermal properties of materials (5 papers). M. von Arx is often cited by papers focused on Advanced MEMS and NEMS Technologies (8 papers), Mechanical and Optical Resonators (6 papers) and Thermal properties of materials (5 papers). M. von Arx collaborates with scholars based in Switzerland, United States and Germany. M. von Arx's co-authors include Oliver Paul, Mark G. Allen, H. Baltes, Jennifer M. English, Michael A. Fonseca, Patrick Ruther, Thierry Leïchlé, Henry Baltes, I. Zana and Wenjing Ye and has published in prestigious journals such as Sensors and Actuators A Physical, Journal of Microelectromechanical Systems and Journal of Micromechanics and Microengineering.

In The Last Decade

M. von Arx

17 papers receiving 548 citations

Peers

Countries citing papers authored by M. von Arx

Since Specialization

Citations

This map shows the geographic impact of M. von Arx's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by M. von Arx with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites M. von Arx more than expected).

Fields of papers citing papers by M. von Arx

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by M. von Arx. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by M. von Arx. The network helps show where M. von Arx may publish in the future.

Co-authorship network of co-authors of M. von Arx

This figure shows the co-authorship network connecting the top 25 collaborators of M. von Arx. A scholar is included among the top collaborators of M. von Arx based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with M. von Arx. M. von Arx is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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17 of 17 papers shown

#	Work	Indexed citations
1	Process-dependent Thermophysical Properties Of CMOS IC Thin Films 2005 ·Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 ·Oliver Paul, M. von Arx, H. Baltes	9
2	A low-power resonant micromachined compass 2004 ·Journal of Micromechanics and Microengineering ·Thierry Leïchlé, M. von Arx, (unknown), I. Zana, Wenjing Ye, Mark G. Allen	28
3	Novel ultrasonic transducer design for fine-pitch wire bonding 2004 ·M. von Arx	3
4	Thermoelectric test structures to measure the heat capacity of CMOS layer sandwiches 2002 ·M. von Arx, Oliver Paul, H. Baltes	1
5	Test structures to measure the heat capacity of CMOS layer sandwiches 2002 ·M. von Arx, Oliver Paul, H. Baltes	2
6	Test structures to measure the Seebeck coefficient of CMOS IC polysilicon 2002 ·M. von Arx, Oliver Paul, H. Baltes	5
7	Ageing behavior of polysilicon heaters for CMOS microstructures operated at temperatures up to 1200 K 2002 ·(unknown), Patrick Ruther, M. von Arx, H. Baltes, Oliver Paul	6
8	A micromachined resonant magnetic field sensor 2002 ·Thierry Leïchlé, M. von Arx, Mark G. Allen	11
9	Wireless micromachined ceramic pressure sensor for high-temperature applications 2002 ·Journal of Microelectromechanical Systems ·Michael A. Fonseca, Jennifer M. English, M. von Arx, Mark G. Allen	265
10	Operation and short-term drift of polysilicon-heated CMOS microstructures at temperatures up to 1200 K 2001 ·Journal of Micromechanics and Microengineering ·(unknown), Patrick Ruther, M. von Arx, Oliver Paul	41
11	A Micromachined Resonant Magnetic Field Sensor 2000 ·Thierry Leïchlé, M. von Arx, Mark G. Allen	3
12	Process-Dependent Thin-Film Thermal Conductivities for Thermal 2000 ·M. von Arx, Oliver Paul, Henry Baltes	3
13	Process-dependent thin-film thermal conductivities for thermal CMOS MEMS 2000 ·Journal of Microelectromechanical Systems ·M. von Arx, Oliver Paul, H. Baltes	145
14	Application of harmonic finite element analysis to a CMOS heat-capacity measurement structure 1998 ·Sensors and Materials ·(unknown), Jan G. Korvink, (unknown), M. von Arx, Oliver Paul, Henry Baltes	3
15	Test structures to measure the heat capacity of CMOS layer sandwiches 1998 ·IEEE Transactions on Semiconductor Manufacturing ·M. von Arx, Oliver Paul, H. Baltes	11
16	Test structures to measure the Seebeck coefficient of CMOS IC polysilicon 1997 ·IEEE Transactions on Semiconductor Manufacturing ·M. von Arx, Oliver Paul, H. Baltes	32
17	Determination of the heat capacity of CMOS layers for optimal CMOS sensor design 1995 ·Sensors and Actuators A Physical ·M. von Arx, Oliver Paul, Henry Baltes	20

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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