Hitoshi Habuka

1.6k total citations
164 papers, 1.3k citations indexed

About

Hitoshi Habuka is a scholar working on Electrical and Electronic Engineering, Materials Chemistry and Biomedical Engineering. According to data from OpenAlex, Hitoshi Habuka has authored 164 papers receiving a total of 1.3k indexed citations (citations by other indexed papers that have themselves been cited), including 119 papers in Electrical and Electronic Engineering, 47 papers in Materials Chemistry and 41 papers in Biomedical Engineering. Recurrent topics in Hitoshi Habuka's work include Thin-Film Transistor Technologies (52 papers), Semiconductor materials and devices (43 papers) and Silicon and Solar Cell Technologies (42 papers). Hitoshi Habuka is often cited by papers focused on Thin-Film Transistor Technologies (52 papers), Semiconductor materials and devices (43 papers) and Silicon and Solar Cell Technologies (42 papers). Hitoshi Habuka collaborates with scholars based in Japan, United Kingdom and Belgium. Hitoshi Habuka's co-authors include Kikuo Okuyama, Manabu Shimada, Masatake Katayama, Naokazu Koizumi, Masahiko Aihara, Takashi Takeuchi, Tomohisa Kato, Yuuki Ishida, Yukio Ando and Tetsuo Kinoshita and has published in prestigious journals such as Journal of The Electrochemical Society, Thin Solid Films and Japanese Journal of Applied Physics.

In The Last Decade

Hitoshi Habuka

154 papers receiving 1.3k citations

Peers

Countries citing papers authored by Hitoshi Habuka

Since Specialization

Citations

This map shows the geographic impact of Hitoshi Habuka's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Hitoshi Habuka with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Hitoshi Habuka more than expected).

Fields of papers citing papers by Hitoshi Habuka

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Hitoshi Habuka. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Hitoshi Habuka. The network helps show where Hitoshi Habuka may publish in the future.

Co-authorship network of co-authors of Hitoshi Habuka

This figure shows the co-authorship network connecting the top 25 collaborators of Hitoshi Habuka. A scholar is included among the top collaborators of Hitoshi Habuka based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Hitoshi Habuka. Hitoshi Habuka is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

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20 of 20 papers shown

#	Work	Indexed citations
1	Gas phase and surface processes of SiC N O film formation by parallel plate plasma-enhanced chemical vapor deposition without heat assistance 2025 ·Materials Chemistry and Physics ·Hitoshi Habuka	0
2	Anticorrosive Behavior of Aluminum Nitride Surface Exposed to Chlorine Trifluoride Gas at High Temperatures 2021 ·ECS Journal of Solid State Science and Technology ·(unknown), (unknown), (unknown), Hitoshi Habuka, (unknown)	1
3	Chlorine Trifluoride Gas Distributor Design for Single-Crystalline C-Face 4H-Silicon Carbide Wafer Etcher 2019 ·Materials science forum ·(unknown), (unknown), (unknown), (unknown), Hitoshi Habuka, (unknown), Tomohisa Kato	0
4	Water Outlet Design of Wet Cleaning Bath for 300-mm Diameter Silicon Wafers 2018 ·ECS Journal of Solid State Science and Technology ·(unknown), (unknown), Hitoshi Habuka, (unknown)	3
5	Quick Cleaning Process for Silicon Carbide Chemical Vapor Deposition Reactor 2017 ·ECS Journal of Solid State Science and Technology ·(unknown), (unknown), Hitoshi Habuka, Hideki Ito, (unknown), (unknown)	11
6	Mirror Etching of Single Crystalline C-Face 4H-Silicon Carbide Wafer by Chlorine Trifluoride Gas 2017 ·ECS Journal of Solid State Science and Technology ·(unknown), (unknown), Hitoshi Habuka, (unknown), Tomohisa Kato	4
7	Non-Heat Assistance Plasma-Enhanced Chemical Vapor Deposition of SiC_xN_yO_zFilm Using Monomethylsilane, Nitrogen and Argon 2017 ·ECS Journal of Solid State Science and Technology ·(unknown), (unknown), (unknown), Hitoshi Habuka	6
8	Formation and Removal of Carbon Film on Silicon Carbide Surface Using Chlorine Trifluoride Gas 2016 ·ECS Journal of Solid State Science and Technology ·(unknown), Hitoshi Habuka, (unknown), Tomohisa Kato	3
9	In Situ Measurement for Evaluating Temperature Change Related to Silicon Film Formation in a SiHCl₃-H₂System 2015 ·ECS Journal of Solid State Science and Technology ·(unknown), (unknown), Hitoshi Habuka	5
10	Numerical Calculation Model of Single Wafer Wet Etcher Using Swinging Nozzle 2013 ·ECS Transactions ·Hitoshi Habuka, (unknown), (unknown), Tetsuo Kinoshita	2
11	Low Temperature SiC Film Deposition Using Trichlorosilane Gas and Monomethylsilane Gas 2011 ·Journal of Nanoscience and Nanotechnology ·Hitoshi Habuka, Yukio Ando	3
12	Silicon carbide film deposition at low temperatures using monomethylsilane gas 2009 ·Surface and Coatings Technology ·Hitoshi Habuka, Hiroshi Ohmori, Yukio Ando	15
13	4H Silicon Carbide Etching Using Chlorine Trifluoride Gas 2008 ·Materials science forum ·Hitoshi Habuka, (unknown), Yutaka Miura, Keiko Tanaka, Yasushi Fukai, (unknown), Yuan Gao, Tomohisa Kato, Hajime Okumura, Kazuo Arai	11
14	2006 ·Shinku ·Hitoshi Habuka	1
15	Etch rate and surface morphology of polycrystalline β-silicon carbide using chlorine trifluoride gas 2006 ·Thin Solid Films ·Hitoshi Habuka, (unknown), Yasushi Fukai, (unknown), Takashi Takeuchi, Masahiko Aihara	9
16	Heat Balance Evaluation for Rapid Thermal Processing System Design 2005 ·Journal of The Electrochemical Society ·Hitoshi Habuka, (unknown), Takashi Sakurai, Takashi Takeuchi, Masahiko Aihara	5
17	Nano-Porous Structure Change of Carbonate and Oxide as Solid Reactant for Thermal-Energy Storage and Temperature Upgrade 2004 ·Masahiko Aihara, (unknown), (unknown), Takashi Takeuchi, Hitoshi Habuka	1
18	Dominant Overall Chemical Reaction in a Chlorine Trifluoride–Silicon–Nitrogen System at Atmospheric Pressure 1999 ·Japanese Journal of Applied Physics ·Hitoshi Habuka, (unknown), (unknown)	9
19	Haze Generation on Silicon Surface Heated in Hydrogen Ambient at Atmospheric Pressure 1997 ·Journal of The Electrochemical Society ·Hitoshi Habuka, (unknown), Masatake Katayama	5
20	Three Dimensional Calculations of Si Epitaxial Thin-Film Growth Using Transport and Epitaxy Model for SiHCl_3-H_2 System 1996 ·Hitoshi Habuka, Masatake Katayama, Manabu Shimada, Kikuo Okuyama	1

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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