D. E. Ibbotson

2.3k citations

55 papers · 1.8k indexed · h-index 21

Materials Chemistry top 5%
- Catalytic Processes in Materials Science 8
- Diamond and Carbon-based Materials Research 4
Catalysis top 10%
Mechanics of Materials top 2%
- Metal and Thin Film Mechanics 6
Surfaces, Coatings and Films top 5%
Electrical and Electronic Engineering top 5%
- Semiconductor materials and devices 30
- Plasma Diagnostics and Applications 13
- Advancements in Semiconductor Devices and Circuit Design 7
Atomic and Molecular Physics, and Optics
- Advanced Chemical Physics Studies 10
Electronic, Optical and Magnetic Materials
- Copper Interconnects and Reliability 7

Co-authors: Daniel Flamm J. A. Mucha Vincent M. Donnelly W. H. Weinberg T.S. Wittrig James L. Taylor C.-P. Chang Nur Selamoglu
Cited by: Materials Chemistry Catalysis Mechanics of Materials
Journals: Journal of Applied Physics (9 papers)Surface Science (8 papers)Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (3 papers)
Partner nations: United States France Taiwan

In The Last Decade

D. E. Ibbotson

55 papers receiving 1.7k citations

Peers

Countries citing papers authored by D. E. Ibbotson

Since Specialization

Citations

This map shows the geographic impact of D. E. Ibbotson's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by D. E. Ibbotson with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites D. E. Ibbotson more than expected).

Fields of papers citing papers by D. E. Ibbotson

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by D. E. Ibbotson. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by D. E. Ibbotson. The network helps show where D. E. Ibbotson may publish in the future.

Co-authorship network

The 25 scholars most cited alongside D. E. Ibbotson, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with D. E. Ibbotson Line = papers co-authored together D. E. Ibbotson links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

#	Work
1	Comparison between e-beam direct write and immersion lithography for 20nm node Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Christopher Cleghorn,Marco Gonzales,D. E. Ibbotson,Marco Wieland,Aurélien Fay	2015	3
2	Manufacturability optimization and design validation studies for FPGA-based, 3D integrated circuits Symposium on VLSI Technology ·D. E. Ibbotson,Arif Rahman,Kenjl TORIZUKA,Kaushik Chanda,Hamam Faridatush Shofianti,ปิติมา แก้วเขียว,J. O'Conor,Katherine Newton,Shin-Puu Jeng,S. Y. Hou,Douglas Yu	2013	3
3	Plasma Etching Endpointing by Monitoring Radio‐Frequency Power Systems with an Artificial Neural Network Journal of The Electrochemical Society ·Helen Maynard,M. Yakovlev,Nicolas Vion,D. E. Ibbotson	1996	14
4	Chemical Vapor Deposition of SiC from Silacyclobutane and Methylsilane MRS Proceedings ·A. D. Johnson,J. Perrin,J. A. Mucha,D. E. Ibbotson	1992	3
5	<title>Studies of low-pressure helical resonator discharges for advanced etching</title> Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·D. E. Ibbotson,Apprilia Apprilia	1992	4
6	The etching of doped polycrystalline silicon by molecular chlorine Journal of Applied Physics ·E. A. Ogryzlo,Daniel Flamm,D. E. Ibbotson,J. A. Mucha	1988	20
7	Plasma and gaseous etching of compounds of Groups III-V Pure and Applied Chemistry ·D. E. Ibbotson	1988	10
8	Fluorinated chemistry for high-quality, low hydrogen plasma-deposited silicon nitride films Journal of Applied Physics ·خلود إبراهيم عبد العليم الشربينى الجندى,Daniel Flamm,D. E. Ibbotson,J. A. Mucha	1987	30
9	Invited Paper Novel Chemistry For High Quality, Low Hydrogen PECVD Silicon Nitride Films Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·D. E. Ibbotson,C.-P. Chang,Daniel Flamm,J. A. Mucha	1987	2
10	Catalyzed gaseous etching of silicon Journal of Applied Physics ·Nur Selamoglu,J. A. Mucha,Daniel Flamm,D. E. Ibbotson	1987	13
11	Complementary p-MODFET and n-HB MESFET (Al,Ga)As FET's R.A. Kiehl,A. C. Gossard,W. Wiegmann,D. E. Ibbotson	1984	1
12	Comparison of XeF2 and F-atom reactions with Si and SiO2 Applied Physics Letters ·D. E. Ibbotson,Daniel Flamm,J. A. Mucha,Vincent M. Donnelly	1984	86
13	Crystallographic etching of GaAs with bromine and chlorine plasmas Journal of Applied Physics ·D. E. Ibbotson,Daniel Flamm,Vincent M. Donnelly	1983	76
14	Basic chemistry and mechanisms of plasma etching Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ·Daniel Flamm,Vincent M. Donnelly,D. E. Ibbotson	1983	126
15	Reply to comments on “the chemisorption and decomposition of no on the (110) surface of iridium” Surface Science ·D. E. Ibbotson,T.S. Wittrig,W. H. Weinberg	1982	2
16	The adsorption of water on the reconstructed Ir(110)-(1 × 2) surface Surface Science ·T.S. Wittrig,D. E. Ibbotson,W. H. Weinberg	1981	51
17	Summary Abstract: Carbon monoxide oxidation catalysis over Ir(110) Journal of Vacuum Science and Technology ·W. H. Weinberg,D. E. Ibbotson,James L. Taylor	1981	3
18	The chemisorption and decomposition of NO on the (110) surface of iridium Surface Science ·D. E. Ibbotson,T.S. Wittrig,W. H. Weinberg	1981	54
19	The co-adsorption of hydrogen and carbon monoxide on the (110) surface of iridium† Surface Science ·D. E. Ibbotson,T.S. Wittrig,W. H. Weinberg	1980	30
20	The chemisorption of CO on clean and oxidized Ir(110) The Journal of Chemical Physics ·James L. Taylor,D. E. Ibbotson,W. H. Weinberg	1978	83

About D. E. Ibbotson

D. E. Ibbotson is a scholar working on Electrical and Electronic Engineering, Catalysis and Electronic, Optical and Magnetic Materials, having authored 55 papers that have together received 1.8k indexed citations. Recurring topics across this work include Semiconductor materials and devices (30 papers), Plasma Diagnostics and Applications (13 papers), Advanced Chemical Physics Studies (10 papers), Catalytic Processes in Materials Science (8 papers), Copper Interconnects and Reliability (7 papers), Advancements in Semiconductor Devices and Circuit Design (7 papers), Metal and Thin Film Mechanics (6 papers) and Diamond and Carbon-based Materials Research (4 papers). The work is most often cited by research in Materials Chemistry (945 citations), Catalysis (138 citations) and Mechanics of Materials (479 citations). D. E. Ibbotson has collaborated with scholars based in United States, France and Taiwan. Frequent co-authors include Daniel Flamm, J. A. Mucha, Vincent M. Donnelly, W. H. Weinberg, T.S. Wittrig, James L. Taylor, C.-P. Chang, W. H. Weinberg, Nur Selamoglu and J.M. Cook. Their work appears in journals such as Journal of Applied Physics, Surface Science, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Applied Physics Letters and Journal of The Electrochemical Society.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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