T.F. Retajczyk

Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature

Low Dielectric Constant Materials for ULSI Interconnects

A comprehensive review of ZnO materials and devices

Diamond-like amorphous carbon

Point defects and dopant diffusion in silicon

An ultrasensitive silicon pressure-based microflow sensor

Gaseous slip flow in long microchannels

Low dielectric constant materials for microelectronics

Film stress-related vacancy supersaturation in silicon under low-pressure chemical vapor deposited silicon nitride films

Cavity optomechanics

Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history

Determination of the mechanical properties of r.f.-magnetron-sputtered zinc oxide thin films on substrates

I n s i t u stress measurement of refractory metal silicides during sintering

Elastic stiffness and thermal expansion coefficients of various refractory silicides and silicon nitride films

Elastic stiffness and thermal expansion coefficient of BN films