Citation Impact
Citing Papers
Freeform lens arrays for off-axis illumination in an optical lithography system
2011
Nanostructures and Functional Materials Fabricated by Interferometric Lithography
2010
Manufacturing and measurement of freeform optics
2013 Standout
A History of Resolution Enhancement Technology
2005
Transport phenomena in nanofluidics
2008 Standout
Nanoparticle Size and Surface Chemistry Determine Serum Protein Adsorption and Macrophage Uptake
2011 Standout
Works of Robert Socha being referenced
Performance of FlexRay: a fully programmable illumination system for generation of freeform sources on high NA immersion systems
2010
Process results using automatic pitch decomposition and double patterning technology (DPT) at k1eff <0.20
2006
Contact hole reticle optimization by using interference mapping lithography (IML)
2004
Contact hole reticle optimization by using interference mapping lithography (IML)
2004