Citation Impact
Citing Papers
Non-Poissonian Quantum Jumps of a Fluxonium Qubit due to Quasiparticle Excitations
2014 StandoutNobel
Particle simulations of radio-frequency glow discharges
1991
Dynamical processes in complex plasmas
2001
RF discharge modeling considering time dependence and spatial nonlocality of the electron energy spectrum
1991
Estimation of the light output power and efficiency of Xe barrier discharge excimer lamps using a one-dimensional fluid model for various voltage waveforms
2000
Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC
1991 Standout
Power amplifiers and transmitters for RF and microwave
2002 Standout
Complex (dusty) plasmas: Current status, open issues, perspectives
2005 Standout
Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor
1995
Diamond-like amorphous carbon
2002 Standout
Plasma Crystal: Coulomb Crystallization in a Dusty Plasma
1994 Standout
Silicon microring resonators
2011 Standout
Measurement of electron energy distribution in low-pressure RF discharges
1992 Standout
Pattern Based Prediction for Plasma Etch
2007
Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities
2000
Electron heating in low-pressure rf glow discharges
1990
Dielectric-Barrier Discharges: Their History, Discharge Physics, and Industrial Applications
2003 Standout
Speeding Up Fluid Models for Gas Discharges by Implicit Treatment of the Electron Energy Source Term
2000
Two-dimensional fluid modelling of charged particle transport in radio-frequency capacitively coupled discharges
2002
Opportunities for mesoscopics in thermometry and refrigeration: Physics and applications
2006
Instabilities in a dusty plasma with ion drag and ionization
1999
Microwave solid-state active devices
2002
Bibliographical review on reconfigurable fault-tolerant control systems
2008 Standout
Self-consistent model of a direct-current glow discharge: Treatment of fast electrons
1990
Ion and electron dynamics in the sheath of radio-frequency glow discharges
1991
Numerical model of rf glow discharges
1987
An Extended Kalman filtering-based method of processing reflectometry data for fast in-situ etch rate measurements
1997
Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models
2005 Standout
A common-path heterodyne interferometer for surface profiling in microelectronic fabrication
2001 StandoutNobel
Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
1990 Standout
Colloquium: Phononics: Manipulating heat flow with electronic analogs and beyond
2012 Standout
Works of M.E. Elta being referenced
A self-consistent particle model for the simulation of RF glow discharges
1991
High-Frequency Limitations of IMPATT, MITATT, and TUNNETT Mode Devices
1979
Real-time feedback control of reactive ion etching
1994
Large-signal performance of microwave transit-time devices in mixed tunneling and avalanche breakdown
1979
A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges
1988
Large-signal time-domain modeling of low-pressure rf glow discharges
1987
Plasma-etch technology
1990
Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher
1995
Optical emission spectroscopy on the GEC reference cell
1994