Citation Impact
Citing Papers
Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography
2009
6. Molecular Spectroscopy Techniques Applied for Processing Plasma Diagnostics
2004
Silicon microring resonators
2011 Standout
Reactive species in non-equilibrium atmospheric-pressure plasmas: Generation, transport, and biological effects
2016 Standout
Loss reduction in silicon nanophotonic waveguide micro-bends through etch profile improvement
2011
Works of E. Pargon being referenced
Impact of chemistry on profile control of resist masked silicon gates etched in high density halogen-based plasmas
2003