Plasma etching : an introduction

370 indexed citations

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This paper, published in 1989, received 370 indexed citations. Written by D. Manos and Daniel Flamm covering the research area of Electrical and Electronic Engineering. It is primarily cited by scholars working on Electrical and Electronic Engineering (273 citations), Materials Chemistry (82 citations) and Mechanics of Materials (79 citations). Published in Academic Press eBooks.

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This paper is also available at doi.org/w3441543.

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