Fundamentals of microfabrication : the science of miniaturization

1.1k indexed citations

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This paper, published in 2002, received 1.1k indexed citations. Written by Marc Madou covering the research area of Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering and Biomedical Engineering. It is primarily cited by scholars working on Biomedical Engineering (600 citations), Electrical and Electronic Engineering (550 citations) and Atomic and Molecular Physics, and Optics (198 citations). Published in CRC Press eBooks.

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Physical SciencesHealth SciencesLife SciencesSocial Sciences

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This paper is also available at doi.org/w11696035.

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