Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size

433 indexed citations

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This paper, published in 2013, received 433 indexed citations. Written by Zongsong Gan, Yaoyu Cao, Richard A. Evans and Miṅ Gu covering the research area of Biomedical Engineering and Atomic and Molecular Physics, and Optics. It is primarily cited by scholars working on Biomedical Engineering (319 citations), Atomic and Molecular Physics, and Optics (156 citations) and Materials Chemistry (110 citations). Published in Nature Communications.

Countries where authors are citing Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size

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Fields of papers citing Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size

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Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size.

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This paper is also available at doi.org/10.1038/ncomms3061.

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