Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition

528 indexed citations

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This paper, published in 2003, received 528 indexed citations. Written by Jeffrey W. Elam, Dmitri Routkevitch, Peter Mardilovich and Steven M. George covering the research area of Materials Chemistry and Electrical and Electronic Engineering. It is primarily cited by scholars working on Electrical and Electronic Engineering (392 citations), Materials Chemistry (380 citations) and Biomedical Engineering (104 citations). Published in Chemistry of Materials.

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Fields of papers citing Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition

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Physical SciencesHealth SciencesLife SciencesSocial Sciences

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This paper is also available at doi.org/10.1021/cm0303080.

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