Tsuyoshi Moriya

852 total citations
59 papers, 684 citations indexed

About

Tsuyoshi Moriya is a scholar working on Electrical and Electronic Engineering, Mechanics of Materials and Materials Chemistry. According to data from OpenAlex, Tsuyoshi Moriya has authored 59 papers receiving a total of 684 indexed citations (citations by other indexed papers that have themselves been cited), including 34 papers in Electrical and Electronic Engineering, 18 papers in Mechanics of Materials and 18 papers in Materials Chemistry. Recurrent topics in Tsuyoshi Moriya's work include Semiconductor materials and devices (18 papers), Plasma Diagnostics and Applications (13 papers) and Muon and positron interactions and applications (13 papers). Tsuyoshi Moriya is often cited by papers focused on Semiconductor materials and devices (18 papers), Plasma Diagnostics and Applications (13 papers) and Muon and positron interactions and applications (13 papers). Tsuyoshi Moriya collaborates with scholars based in Japan, United States and Indonesia. Tsuyoshi Moriya's co-authors include Natsuko Ito, Fumihiko Uesugi, Hiroaki Yano, Hiroo Iwata, H. Enomoto, Akira Uedono, Fangming Jin, Yasuhiko Hayashi, Masao Matsumoto and Z. C. Zhou and has published in prestigious journals such as Applied Physics Letters, Journal of Applied Physics and Journal of Chromatography A.

In The Last Decade

Tsuyoshi Moriya

56 papers receiving 669 citations

Peers

Tsuyoshi Moriya

EEE

AMPO

Jae‐Won Lee South Korea

Xin Wen China

T. Miyazawa Japan

Chang-Geun Ahn South Korea

J. Courbat Switzerland

Xiangru Wang China

Guang Yuan China

Wang Peng China

Björn Kruse Sweden

Hung‐Wen Chen Taiwan

Jae‐Won Lee South Korea

Tsuyoshi Moriya

192 ×0.5

EEE

159 ×0.9

59 ×0.4

190 ×1.4

122 ×0.9

AMPO

Citations per year, relative to Tsuyoshi Moriya Tsuyoshi Moriya (= 1×) peers Jae‐Won Lee

Countries citing papers authored by Tsuyoshi Moriya

Since Specialization

Citations

This map shows the geographic impact of Tsuyoshi Moriya's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Tsuyoshi Moriya with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Tsuyoshi Moriya more than expected).

Fields of papers citing papers by Tsuyoshi Moriya

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Tsuyoshi Moriya. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Tsuyoshi Moriya. The network helps show where Tsuyoshi Moriya may publish in the future.

Co-authorship network of co-authors of Tsuyoshi Moriya

This figure shows the co-authorship network connecting the top 25 collaborators of Tsuyoshi Moriya. A scholar is included among the top collaborators of Tsuyoshi Moriya based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Tsuyoshi Moriya. Tsuyoshi Moriya is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

Sort: Min cites: Since: Top N: Style:

20 of 20 papers shown

Harashima, Yosuke, Hiroaki Koga, Zeyuan Ni, et al.. (2023). Finite temperature effects on the structural stability of Si-doped HfO2 using first-principles calculations. Applied Physics Letters. 122(26). 1 indexed citations

Harashima, Yosuke, Hiroaki Koga, Zeyuan Ni, et al.. (2022). Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations. 54. 1–3.

Uedono, Akira, Ryu Hasunuma, Yosuke Harashima, et al.. (2022). Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by monoenergetic positron beams. Thin Solid Films. 762. 139557–139557. 5 indexed citations

Moriya, Tsuyoshi. (2021). Machine Learning Approaches Optimizing Semiconductor Manufacturing Processes. 1–3. 5 indexed citations

Li, Hu, et al.. (2020). Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO ₂ ) plasma enhanced atomic layer deposition (PEALD) processes. Japanese Journal of Applied Physics. 59(SJ). SJJA01–SJJA01. 13 indexed citations

Iwashita, Shinya, Tsuyoshi Moriya, & Akira Uedono. (2018). Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 36(6). 4 indexed citations

Moriya, Tsuyoshi, et al.. (2015). Observation and Elimination of Recoil Particles From Turbo Molecular Pumps. IEEE Transactions on Semiconductor Manufacturing. 28(3). 253–259. 4 indexed citations

Uedono, Akira, Tsuyoshi Moriya, S. Kimura, et al.. (2012). Vacancy-Type Defects Introduced by Gas Cluster Ion-Implantation on Si Studied by Monoenergetic Positron Beams. Japanese Journal of Applied Physics. 51(11R). 111801–111801. 5 indexed citations

Moriya, Tsuyoshi, et al.. (2011). Vertical re-startup of plasma etching tool from earthquake. 1–11. 1 indexed citations

10.

Moriya, Tsuyoshi, et al.. (2010). Effects of surface conditions of the Focus Ring on etching uniformity. 1–3. 2 indexed citations

11.

Moriya, Tsuyoshi, et al.. (2008). Knowledge sharing and creation in the semiconductor equipment industry. 129–132. 1 indexed citations

12.

Zhou, Z. C., et al.. (2006). A continuous flow reaction system for producing acetic acid by wet oxidation of biomass waste. Journal of Materials Science. 41(5). 1501–1507. 16 indexed citations

13.

Iwata, Hiroo, et al.. (2004). Food simulator: a haptic interface for biting. 51–57. 45 indexed citations

14.

Iwata, Hiroo, et al.. (2004). Food simulator: a haptic interface for biting. 51–57. 36 indexed citations

15.

Moriya, Tsuyoshi, et al.. (2000). Generation of positively charged particles at an anode and transport to device wafers in a real radio frequency plasma etching chamber for tungsten etch-back process. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films. 18(4). 1282–1286. 27 indexed citations

16.

Kishita, Atsushi, et al.. (1998). Upgrading of bitumen with supercritical water for a system combined with SAGD. 43(3). 741–743. 7 indexed citations

17.

Uedono, Akira, Satoshi Fujii, Tsuyoshi Moriya, et al.. (1997). Defects in the Ti/GaAs system probed by monoenergetic positron beams. Journal of Physics Condensed Matter. 9(32). 6827–6835. 1 indexed citations

18.

Watanabe, Masahito, T. Kitano, Satoshi Asada, et al.. (1996). Effects of Vacancy-Type Defects on Electrical-Activation of P⁺ Implanted into Silicon. MRS Proceedings. 439. 1 indexed citations

19.

Uedono, Akira, Tsuyoshi Moriya, Shoichiro Tanigawa, Takeshi Kawano, & Yuzuru Ohji. (1995). Positron annihilation in SiO2/Si structure at low temperature. Journal of Applied Physics. 78(5). 3269–3273. 6 indexed citations

20.

Moriya, Tsuyoshi, et al.. (1992). Effects of polyoxyethylene (20) sorbitan monooleate on the acute toxicity of linear alkylbenzenesulfonate (C12LAS) to fish. Ecotoxicology and Environmental Safety. 24(1). 26–36. 4 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

Explore authors with similar magnitude of impact