Michael T. Mocella

635 total citations
21 papers, 506 citations indexed

About

Michael T. Mocella is a scholar working on Electrical and Electronic Engineering, Organic Chemistry and Materials Chemistry. According to data from OpenAlex, Michael T. Mocella has authored 21 papers receiving a total of 506 indexed citations (citations by other indexed papers that have themselves been cited), including 13 papers in Electrical and Electronic Engineering, 7 papers in Organic Chemistry and 3 papers in Materials Chemistry. Recurrent topics in Michael T. Mocella's work include Advancements in Photolithography Techniques (6 papers), Semiconductor materials and devices (6 papers) and Plasma Diagnostics and Applications (6 papers). Michael T. Mocella is often cited by papers focused on Advancements in Photolithography Techniques (6 papers), Semiconductor materials and devices (6 papers) and Plasma Diagnostics and Applications (6 papers). Michael T. Mocella collaborates with scholars based in United States and Belgium. Michael T. Mocella's co-authors include E. Kent Barefield, M. J. D’Aniello, Frank S. Wagner, Herbert H. Sawin, E. L. Muetterties, Iain C. Paul, Terry R. Turner, Heeyeop Chae, Mark Busch and Kenneth D. Allen and has published in prestigious journals such as Journal of the American Chemical Society, Journal of The Electrochemical Society and Inorganic Chemistry.

In The Last Decade

Michael T. Mocella

21 papers receiving 446 citations

Peers — A (Enhanced Table)

Peers by citation overlap · career bar shows stage (early→late) cites · hero ref

Name h Career Trend Papers Cites
Michael T. Mocella United States 13 158 153 138 135 121 21 506
Anthony T. Baker Australia 15 145 0.9× 130 0.8× 152 1.1× 112 0.8× 113 0.9× 41 542
G. Reck Germany 12 329 2.1× 121 0.8× 176 1.3× 76 0.6× 141 1.2× 55 609
Rolf Linder Germany 9 157 1.0× 68 0.4× 83 0.6× 67 0.5× 84 0.7× 16 534
I. Chávez Chile 16 168 1.1× 91 0.6× 454 3.3× 153 1.1× 132 1.1× 57 670
Christopher David Cook Australia 16 115 0.7× 130 0.8× 473 3.4× 145 1.1× 115 1.0× 81 956
William H. Morrison United States 13 132 0.8× 244 1.6× 374 2.7× 118 0.9× 139 1.1× 29 734
Arie R. Van Doorn Netherlands 12 332 2.1× 190 1.2× 155 1.1× 42 0.3× 67 0.6× 16 577
A. A. McConnell United Kingdom 11 201 1.3× 122 0.8× 61 0.4× 58 0.4× 100 0.8× 22 462
Stephen M. Woessner United States 10 419 2.7× 264 1.7× 205 1.5× 118 0.9× 131 1.1× 15 651
Frank Fleischer Germany 12 252 1.6× 127 0.8× 217 1.6× 33 0.2× 82 0.7× 19 561

Countries citing papers authored by Michael T. Mocella

Since Specialization
Citations

This map shows the geographic impact of Michael T. Mocella's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Michael T. Mocella with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Michael T. Mocella more than expected).

Fields of papers citing papers by Michael T. Mocella

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Michael T. Mocella. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Michael T. Mocella. The network helps show where Michael T. Mocella may publish in the future.

Co-authorship network of co-authors of Michael T. Mocella

This figure shows the co-authorship network connecting the top 25 collaborators of Michael T. Mocella. A scholar is included among the top collaborators of Michael T. Mocella based on the total number of citations received by their joint publications. Widths of edges represent the number of papers authors have co-authored together. Node borders signify the number of papers an author published with Michael T. Mocella. Michael T. Mocella is excluded from the visualization to improve readability, since they are connected to all nodes in the network.

All Works

20 of 20 papers shown
1.
Tran, Hoang V., Eric Hendrickx, Roger H. French, et al.. (2008). High Refractive Index Fluid Evaluations at 193nm: Fluid Lifetime and Fluid/Resist Interaction Studies. Journal of Photopolymer Science and Technology. 21(5). 631–639. 3 indexed citations
2.
French, Roger H., Hoang V. Tran, N. Rogado, et al.. (2008). High-index immersion fluids enabling cost-effective single-exposure lithography for 32 nm half pitches. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6924. 692417–692417. 4 indexed citations
3.
French, Roger H., Hoang V. Tran, N. Rogado, et al.. (2008). High-index immersion fluids enabling cost-effective single-exposure lithography for 32 nm half pitches. 6924. 1 indexed citations
4.
French, Roger H., Hoang V. Tran, Jerald Feldman, et al.. (2007). High-index immersion lithography with second-generation immersion fluids to enable numerical aperatures of 1.55 for cost effective 32-nm half pitches. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 6520. 65201O–65201O. 18 indexed citations
5.
French, Roger H., Jerald Feldman, Weiming Qiu, et al.. (2007). Evaluation of Next Generation Fluids for ArF Immersion Lithography Beyond Water. Journal of Photopolymer Science and Technology. 20(5). 729–738. 7 indexed citations
6.
Mocella, Michael T., et al.. (2003). Evaluation of Octafluorocyclobutane as a Chamber Clean Gas in a Plasma-Enhanced Silicon Dioxide Chemical Vapor Deposition Reactor. Journal of The Electrochemical Society. 150(2). G122–G122. 3 indexed citations
7.
Mocella, Michael T.. (2003). Fluorinated compounds for advanced IC interconnect applications: a survey of chemistries and processes. Journal of Fluorine Chemistry. 122(1). 87–92. 12 indexed citations
8.
Chae, Heeyeop, et al.. (1997). Abatement of perfluorocompounds (PFCs) in a microwave tubular reactor using O/sub 2/ as an additive gas. IEEE Transactions on Semiconductor Manufacturing. 10(3). 399–411. 34 indexed citations
9.
Mocella, Michael T.. (1996). PFC Emission Control Options for Plasma Processing Tools: A Current Assessment. MRS Proceedings. 447. 12 indexed citations
10.
Mocella, Michael T., et al.. (1992). <title>Etch process characterization using neural network methodology: a case study</title>. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 1594. 232–242. 31 indexed citations
11.
Gray, David C., et al.. (1990). Threshold Levels and Effects of Feed Gas Impurities on Plasma Etching Processes. Journal of The Electrochemical Society. 137(11). 3526–3536. 7 indexed citations
12.
Allen, Kenneth D., et al.. (1986). The Plasma Etching of Polysilicon with  CF 3Cl / Argon Discharges: I . Parametric Modeling and Impedance Analysis. Journal of The Electrochemical Society. 133(11). 2315–2325. 29 indexed citations
13.
Mocella, Michael T., Brian E. Thompson, & Herbert H. Sawin. (1986). Directional Plasma Etching of Polysilicon in SF6/CFCL3 discharges. MRS Proceedings. 68. 6 indexed citations
14.
Mocella, Michael T., et al.. (1976). Mechanism of the olefin metathesis reaction. 4. Catalyst precursors in tungsten(VI) based systems. Journal of the American Chemical Society. 98(15). 4689–4690. 29 indexed citations
15.
Barefield, E. Kent & Michael T. Mocella. (1975). Mechanism of base promoted reduction of nickel(III) complexes of macrocyclic amines. Coordinated ligand radical intermediate. Journal of the American Chemical Society. 97(15). 4238–4246. 58 indexed citations
16.
D’Aniello, M. J., Michael T. Mocella, Frank S. Wagner, E. Kent Barefield, & Iain C. Paul. (1975). Structure of a square pyrimidal pentacoordinate complex of nickel(N-tetramethylcyclam)2+. Kinetically determined ligand stereochemistry. Journal of the American Chemical Society. 97(1). 192–194. 60 indexed citations
17.
Mocella, Michael T., et al.. (1974). Nitrosonium Salts as Reagents in Inorganic Synthesis. Synthesis and Reactivity in Inorganic and Metal-Organic Chemistry. 4(1). 69–90. 20 indexed citations
18.
19.
Barefield, E. Kent & Michael T. Mocella. (1973). Complexes of silver(II) and silver(III) with macrocyclic tetraaza ligands. Inorganic Chemistry. 12(12). 2829–2832. 53 indexed citations
20.
Pinnavaia, Thomas J., et al.. (1973). Redistribution reactions of d0 metal diketonates containing MO6 and MO8 cores. Inorganic Chemistry. 12(4). 763–768. 8 indexed citations

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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