Citation Impact
Citing Papers
Post-etch residue removal using choline chloride–malonic acid deep eutectic solvent (DES)
2011
Deep Eutectic Solvents (DESs) and Their Applications
2014 Standout
Effect of composition of post etch residues (PER) on their removal in choline chloride–malonic acid deep eutectic solvent (DES) system
2012
Works of Yi Su being referenced
A study of post-etch wet clean on electrical and reliability performance of Cu/low k interconnections
2004