Citation Impact
Citing Papers
In Situ Mass Spectrometry Study on Surface Reactions in Atomic Layer Deposition of Al2O3 Thin Films from Trimethylaluminum and Water
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Growth Per Cycle in Atomic Layer Deposition: Real Application Examplesof a Theoretical Model
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Light Trapping in Silicon Nanowire Solar Cells
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Atomic Layer Deposition of Ta2O5 Using the TaI5 and O2 Precursor Combination
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Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors
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Preparation of HfO2 nano-films by atomic layer deposition using HfCl4 and O2 under atmospheric pressure
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Analysis of hydroxyl group controlled atomic layer deposition of hafnium dioxide from hafnium tetrachloride and water
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Titanium Dioxide-Based Nanomaterials for Photocatalytic Fuel Generations
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Latest advances in supercapacitors: from new electrode materials to novel device designs
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Atomic Layer Deposition of Al[sub 2]O[sub 3] Thin Films Using Trimethylaluminum and Isopropyl Alcohol
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Dye-Sensitized Solar Cells
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Template‐Directed Liquid ALD Growth of TiO2 Nanotube Arrays: Properties and Potential in Photovoltaic Devices
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Properties of HfO[sub 2] Thin Films Grown by ALD from Hafnium tetrakis(ethylmethylamide) and Water
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Area selective atomic layer deposition of titanium dioxide: Effect of precursor chemistry
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Correlation between the growth-per-cycle and the surface hydroxyl group concentration in the atomic layer deposition of aluminum oxide from trimethylaluminum and water
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Thickness profiles of thin films caused by secondary reactions in flow-type atomic layer deposition reactors
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Surface morphology and crystallinity control in the atomic layer deposition (ALD) of hafnium and zirconium oxide thin films
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Combining grazing incidence X-ray diffraction and X-ray reflectivity for the evaluation of the structural evolution of HfO2 thin films with annealing
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ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements
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Growth of conductive copper sulfide thin films by atomic layer deposition
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Deposition of HfO[sub 2] Thin Films in HfI[sub 4]-Based Processes
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Role of Water in the Atomic Layer Deposition of TiO2 on SiO2
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Structure evolution of atomic layer deposition grown ZrO2 films by deep-ultra-violet Raman and far-infrared spectroscopies
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Effect of Al2O3 Coating on Stabilizing LiNi0.4Mn0.4Co0.2O2 Cathodes
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Room temperature CO sensor fabricated from Pt-loaded SnO2 porous nanosolid
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Atomic Layer Deposition: An Overview
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Atomic Layer Deposition of HfO2 Using Alkoxides as Precursors
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Precisely Applying TiO2 Overcoat on Supported Au Catalysts Using Atomic Layer Deposition for Understanding the Reaction Mechanism and Improved Activity in CO Oxidation
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Influence of atomic layer deposition parameters on the phase content of Ta2O5 films
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Titanium dioxide nanofibers prepared by using electrospinning method
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Photo-Induced Atomic Layer Deposition of Tantalum Oxide Thin Films from Ta(OC[sub 2]H[sub 5])[sub 5] and O[sub 2]
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Composition and thickness determination of thin oxide films: comparison of different programs and methods
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Atomic Layer Deposition of Hafnium Dioxide Films from 1-Methoxy-2-methyl-2-propanolate Complex of Hafnium
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TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition
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Atomic layer deposition of ZrO2 thin films using a new alkoxide precursor
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Novel Carbon-Doped TiO2 Nanotube Arrays with High Aspect Ratios for Efficient Solar Water Splitting
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Band Bending in Semiconductors: Chemical and Physical Consequences at Surfaces and Interfaces
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Understanding TiO2Photocatalysis: Mechanisms and Materials
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Reaction mechanism studies on the zirconium chloride–water atomic layer deposition process
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ZrO2 Thin Films Grown on Silicon Substrates by Atomic Layer Deposition with Cp2Zr(CH3)2 and Water as Precursors
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Fine Pore‐Structure Engineering by Ligand Conformational Control of Naphthalene Diimide‐Based Semiconducting Porous Coordination Polymers for Efficient Chemiresistive Gas Sensing
2022 StandoutNobel
Spectroscopic study of nanocrystalline TiO2 thin films grown by atomic layer deposition
1998
Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition
2002
In Situ Quadrupole Mass Spectrometry and Quartz Crystal Microbalance Studies on the Atomic Layer Deposition of Titanium Dioxide from Titanium Tetrachloride and Water
2001
Atomic Layer Epitaxy of Copper on Tantalum
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ZnO−Al2O3 and ZnO−TiO2 Core−Shell Nanowire Dye-Sensitized Solar Cells
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In situ resistivity measurements during the atomic layer deposition of ZnO and W thin films
2002
Self-limiting growth of ZrO2 films on a Si(100) substrate using ZrCl4 and O2 under atmospheric pressure
2003
Dielectric Properties of Zirconium Oxide Grown by Atomic Layer Deposition from Iodide Precursor
2001
Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties
2002
Atomic layer deposition of zirconium silicate films using zirconium tetra-tert-butoxide and silicon tetrachloride
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Template‐Assisted Fabrication of Dense, Aligned Arrays of Titania Nanotubes with Well‐Controlled Dimensions on Substrates
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Anatase TiO2 thin films grown on lattice-matched LaAlO3 substrate by laser molecular-beam epitaxy
2001
Atomic layer deposition of hafnium oxide: A detailed reaction mechanism from first principles
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Introducing atomic layer epitaxy for the deposition of optical thin films
1996
Photoluminescence characterization of pure and Sm3+-doped thin metaloxide films
2005
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
2005 Standout
Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water
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Non-Aqueous Approach to Synthesize Amorphous/Crystalline Metal Oxide-Graphene Nanosheet Hybrid Composites
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Photoelectrocatalytic Materials for Solar Water Splitting
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Elucidating the Nature of Pseudo Jahn–Teller Distortions in LixMnPO4: Combining Density Functional Theory with Soft and Hard X-ray Spectroscopy
2013 StandoutNobel
Increment of the Dielectric Constant of Ta[sub 2]O[sub 5] Thin Films by Retarding Interface Oxide Growth on Si Substrates
2001
TiO2 atomic layer deposition on ZrO2 particles using alternating exposures of TiCl4 and H2O
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Atomic layer deposition of hafnium silicate films using hafnium tetrachloride and tetra-n-butyl orthosilicate
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Atomic layer deposition and characterization of hafnium oxide grown on silicon from tetrakis(diethylamino)hafnium and water vapor
2004
Chemical interaction between atomic-layer-deposited HfO2 thin films and the Si substrate
2002
Atomic layer deposition of zirconium silicate films using zirconium tetrachloride and tetra-n-butyl orthosilicate
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Vanadium Oxyfluoride/Few-Layer Graphene Composite as a High-Performance Cathode Material for Lithium Batteries
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Field Effects in Plasmonic Photocatalyst by Precise SiO2 Thickness Control Using Atomic Layer Deposition
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Atomic Layer Deposition of Thin Films Using O2 as Oxygen Source
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Transmission electron microscopy studies of atomic layer deposition TiO2 films grown on silicon
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Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications
1998
Atomic layer deposition of ZnS thin films based on diethyl zinc and hydrogen sulfide
2002
Highly conformal atomic layer deposition of tantalum oxide using alkylamide precursors
2003
Evaluation of New Aminoalkoxide Precursors for Atomic Layer Deposition. Growth of Zirconium Dioxide Thin Films and Reaction Mechanism Studies
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Supercapacitor electrode materials: nanostructures from 0 to 3 dimensions
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Atomic Layer Deposition of Hafnium Dioxide Films Using Hafnium Bis(2‐butanolate)bis(1‐methoxy‐2‐methyl‐2‐propanolate) and Water
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Analytical TEM characterization of the interfacial layer between ALD HfO2 film and silicon substrate
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Deposition of TiN and HfO2 in a commercial 200mm remote plasma atomic layer deposition reactor
2007
In Situ Quartz Crystal Microbalance and Quadrupole Mass Spectrometry Studies of Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum and Water
2001
Photocatalytic performance of chromium or nitrogen doped arc ion plated-TiO2 films
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X-ray spectroscopic study of the electronic structure of visible-light responsive N-, C- and S-doped TiO2
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Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers
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Semiconductor-based Photocatalytic Hydrogen Generation
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Structural and Electrochemical Study of Al2O3 and TiO2 Coated Li1.2Ni0.13Mn0.54Co0.13O2 Cathode Material Using ALD
2013
Hierarchical photocatalysts
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Stabilizing Nanostructured Solid Oxide Fuel Cell Cathode with Atomic Layer Deposition
2013 StandoutNobel
Radial Electron Collection in Dye-Sensitized Solar Cells
2008
Atomic Layer Deposition of ZrO2 Thin Films Using Dichlorobis[bis‐(trimethylsilyl)amido]zirconium and Water
2004
High dielectric constant TiO2 thin films on a Ru electrode grown at 250 °C by atomic-layer deposition
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Mechanism and kinetics of thin zirconium and hafnium oxide film growth in an ALD reactor
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Halbleitergassensoren: Trockensynthese und Anwendung
2010
Atomic Layer Deposition of Epitaxial and Polycrystalline SnO2 Films from the SnI4/O2 Precursor Combination
2003
Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition
2006
Multifunctional hybrid coating on titanium towards hydroxyapatite growth: Electrodeposition of tantalum and its molecular functionalization with organophosphonic acids films
2008
Atomic layer deposition of TiO2−N thin films for photocatalytic applications
2005
TiN Diffusion Barrier Grown by Atomic Layer Deposition Method for Cu Metallization
2001
Trends of structural and electrical properties in atomic layer deposited HfO2 films
2004
Effect of Nature and Location of Defects on Bandgap Narrowing in Black TiO2Nanoparticles
2012 Standout
Lanthanide-Based Luminescent Hybrid Materials
2009 Standout
Structure Evolution and Thermal Stability of High-Energy- Density Li-Ion Battery Cathode Li2VO2F
2017 StandoutNobel
Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition
2002
Analytical model for island growth in atomic layer deposition using geometrical principles
2007
Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials
2004
Properties of hafnium oxide films grown by atomic layer deposition from hafnium tetraiodide and oxygen
2002
Modeled tunnel currents for high dielectric constant dielectrics
1998
Atomic Layer Deposition of SiO2 and TiO2 in Alumina Tubular Membranes: Pore Reduction and Effect of Surface Species on Gas Transport
2000
Atomic layer epitaxy
1998
Atomic Layer Deposition of Nanostructured TiO2 Photocatalysts via Template Approach
2007
Tin Dioxide–Carbon Heterostructures Applied to Gas Sensing: Structure-Dependent Properties and General Sensing Mechanism
2013
Core/Shell Nanoparticles: Classes, Properties, Synthesis Mechanisms, Characterization, and Applications
2011 Standout
Atomic Layer Deposition of TiO2 on Aerogel Templates: New Photoanodes for Dye-Sensitized Solar Cells
2008
Optical characterization of HfO2 thin films grown by atomic layer deposition
2004
Real-Time Monitoring in Atomic Layer Deposition of TiO2 from TiI4 and H2O−H2O2
2000
Cation-Deficient Spinel ZnMn2O4 Cathode in Zn(CF3SO3)2 Electrolyte for Rechargeable Aqueous Zn-Ion Battery
2016 Standout
In Situ Mass Spectrometry Study on Atomic Layer Deposition from Metal (Ti, Ta, and Nb) Ethoxides and Water
2001
Excited-State Electron Transfer from CdS Quantum Dots to TiO2 Nanoparticles via Molecular Linkers with Phenylene Bridges
2009
Amorphous TiO 2 coatings stabilize Si, GaAs, and GaP photoanodes for efficient water oxidation
2014 Science
Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
2003
Atomic Layer Deposition and Chemical Vapor Deposition of Tantalum Oxide by Successive and Simultaneous Pulsing of Tantalum Ethoxide and Tantalum Chloride
2000
Characterization of the Structures of Size-Selected TiO2 Nanoparticles Using X-Ray Absorption Spectroscopy
2004
Titanium Dioxide Nanomaterials: Synthesis, Properties, Modifications, and Applications
2007 Standout
Recent Advances in the Catalytic Oxidation of Volatile Organic Compounds: A Review Based on Pollutant Sorts and Sources
2019 Standout
Properties of Oxide Film Atomic Layer Deposited from Tetraethoxy Silane, Hafnium Halides, and Water
2004
Nanostructured Materials for Room‐Temperature Gas Sensors
2015 Standout
Atomic layer deposition (ALD): from precursors to thin film structures
2002
TiO2 Inverse Opals Fabricated Using Low‐Temperature Atomic Layer Deposition
2005
Monitoring of atomic layer deposition by incremental dielectric reflection
1996
Enhanced Photocurrent in PbS Quantum Dot Photovoltaics via ZnO Nanowires and Band Alignment Engineering
2016 StandoutNobel
Some recent developments in the chemical vapour deposition of electroceramic oxides
2003
Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques
2003
Hafnium oxide films by atomic layer deposition for high-κ gate dielectric applications: Analysis of the density of nanometer-thin films
2005
Atomic Layer Deposition of Hafnium Dioxide Films from Hafnium Hydroxylamide and Water
2004
Some recent developments in the MOCVD and ALD of high-κ dielectric oxides
2004
A review on the visible light active titanium dioxide photocatalysts for environmental applications
2012 Standout
High-κ gate dielectrics: Current status and materials properties considerations
2001 Standout
Enhanced Charge-Collection Efficiencies and Light Scattering in Dye-Sensitized Solar Cells Using Oriented TiO2 Nanotubes Arrays
2006 Standout
Formation of TiO2 Thin Films using NH3 as Catalyst by Metalorganic Chemical Vapor Deposition
2001
Synthesis and photoactivity of nanostructured CdS–TiO2 composite catalysts
2013
Does Chemistry Really Matter in the Chemical Vapor Deposition of Titanium Dioxide? Precursor and Kinetic Effects on the Microstructure of Polycrystalline Films
1999
Simulation of growth dynamics in atomic layer deposition. Part I. Amorphous films
2007
ZnO Nanostructures for Dye‐Sensitized Solar Cells
2009 Standout
Evaluation of a Praseodymium Precursor for Atomic Layer Deposition of Oxide Dielectric Films
2004
Area-Selective ALD of Titanium Dioxide Using Lithographically Defined Poly(methyl methacrylate) Films
2006
Metal Oxides and Oxysalts as Anode Materials for Li Ion Batteries
2013 Standout
Atomic Layer Deposition of Zirconium Titanium Oxide from Titanium Isopropoxide and Zirconium Chloride
2001
DNA Translocation through Graphene Nanopores
2010
Optical properties of HfO2 thin films deposited by magnetron sputtering: From the visible to the far-infrared
2012
Damping of the Growth of Titanium Oxide Nanolayer Formed by Molecular Layer Deposition Technique on Oxidized Silicon Surface
2004
Epitaxial growth of TiO2 films in a hydroxyl-free atomic layer deposition process
2002
Toward practical solar hydrogen production – an artificial photosynthetic leaf-to-farm challenge
2019 Standout
Study of thin hafnium oxides deposited by atomic layer deposition
2004
Microstructure characterisation of ALD-grown epitaxial SnO2 thin films
2003
Porous Anodic Aluminum Oxide: Anodization and Templated Synthesis of Functional Nanostructures
2014 Standout
Works of Teet Uustare being referenced
Characterization of titanium dioxide atomic layer growth from titanium ethoxide and water
2000
Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films
1999
Effect of growth conditions on formation of TiO2-II thin films in atomic layer deposition process
1997
TiO2 thin films by atomic layer deposition: a case of uneven growth at low temperature
1998
Control of thin film structure by reactant pressure in atomic layer deposition of TiO2
1996
Impact of plasma treatment on electrical properties of TiO2/RuO2based DRAM capacitor
2013
Engineering structure and properties of hafnium oxide films by atomic layer deposition temperature
2005
Effects of precursors on nucleation in atomic layer deposition of HfO2
2004
Morphology and structure of TiO2 thin films grown by atomic layer deposition
1995
Titanium isopropoxide as a precursor for atomic layer deposition: characterization of titanium dioxide growth process
2000
Atomic layer deposition of TiO2 thin films from TiI4 and H2O
2002
Growth kinetics and structure formation of ZrO2 thin films in chloride-based atomic layer deposition process
2002
Ti 2p and O 1s X-ray absorption of TiO2 polymorphs
1997
Nanoepitaxy of SnO2 on α-Al2O3(012)
2003
Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide
2001
Texture development in nanocrystalline hafnium dioxide thin films grown by atomic layer deposition
2000
A comparative study of the electrical properties of TiO2films grown by high-pressure reactive sputtering and atomic layer deposition
2005
Atomic-layer-deposited TiO 2 dielectric coatings
1997
Atomic layer deposition of titanium dioxide from TiCl4 and H2O: investigation of growth mechanism
2001
Deposition and etching of tantalum oxide films in atomic layer epitaxy process
1994
Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition
2003
Influence of thickness and growth temperature on the properties of zirconium oxide films grown by atomic layer deposition on silicon
2002
Comparative study of low-temperature chloride atomic-layer chemical vapor deposition of TiO2 and SnO2
2001
Atomic layer growth of epitaxial TiO2 thin films from TiCl4 and H2O on α-Al2O3 substrates
2002
Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures
2001
Influence of structure development on atomic layer deposition of TiO2 thin films
2001
Oxygen depletion of the crystalline (anatase) TiO2 initiated by ionization of the K shell
1994
Effect of selected atomic layer deposition parameters on the structure and dielectric properties of hafnium oxide films
2004
Influence of single and double deposition temperatures on the interface quality of atomic layer deposited Al2O3 dielectric thin films on silicon
2006
Atomic Layer Deposition of Titanium Oxide from TiI4 and H2O2
2000
Properties of tantalum oxide thin films grown by atomic layer deposition
1995
Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition
1997
Influence of growth temperature on properties of zirconium dioxide films grown by atomic layer deposition
2002
Atomic-layer chemical vapor deposition of SnO2 for gas-sensing applications
2001
Atomic Layer Deposition of Tantalum Oxide Thin Films from Iodide Precursor
2000