Standout Papers

Atomic Layer Deposition: An Overview 1996 2026 2006 2016 4.6k
  1. Atomic Layer Deposition: An Overview (2009)
    Steven M. George Chemical Reviews
  2. Low-Temperature Al2O3 Atomic Layer Deposition (2004)
    Markus D. Groner, F. Fabreguette et al. Chemistry of Materials
  3. Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates (2002)
    Markus D. Groner, Jeffrey W. Elam et al. Thin Solid Films
  4. Surface Chemistry for Atomic Layer Growth (1996)
    Steven M. George, A. W. Ott et al. The Journal of Physical Chemistry
  5. Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition (2003)
    Jeffrey W. Elam, Dmitri Routkevitch et al. Chemistry of Materials
  6. Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition (2002)
    Jeffrey W. Elam, Markus D. Groner et al. Review of Scientific Instruments
  7. Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries (2010)
    Yoon Seok Jung, Andrew S. Cavanagh et al. Advanced Materials
  8. Hydrogen desorption kinetics from monohydride and dihydride species on silicon surfaces (1988)
    Pawan Gupta, Vicki L. Colvin et al. Physical review. B, Condensed matter

Immediate Impact

5 by Nobel laureates 15 from Science/Nature 108 standout
Sub-graph 1 of 21

Citing Papers

Characterizing Electrode Materials and Interfaces in Solid-State Batteries
2025 Standout
In Situ TEM Characterization of Battery Materials
2025 Standout
72 intermediate papers

Works of Steven M. George being referenced

In Situ Transmission Electron Microscopy Probing of Native Oxide and Artificial Layers on Silicon Nanoparticles for Lithium Ion Batteries
2014
Nanoscale Interface Modification of LiCoO2by Al2O3Atomic Layer Deposition for Solid-State Li Batteries
2012
and 28 more

Author Peers

Author Last Decade Papers Cites
Steven M. George 27040 20636 4097 5337 486 36.3k
Jianyu Huang 15483 13393 2599 5099 406 27.4k
Isao Tanaka 11092 26446 4340 6840 527 34.4k
Eric A. Stach 19165 28646 2645 10357 474 45.7k
Mark Asta 7936 18353 2821 2603 370 27.7k
Yuichi Ikuhara 11583 17108 2392 6050 920 28.8k
Yves J. Chabal 17328 20151 8027 4126 461 34.1k
Gustaaf Van Tendeloo 9299 23312 3384 10017 943 38.2k
Jeffrey W. Elam 14644 16129 1356 3247 382 25.6k
Michael J. Aziz 12908 8866 1757 2605 353 21.5k
Nigel D. Browning 9074 13975 2285 4214 560 24.4k

All Works

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Rankless by CCL
2026