Immediate Impact
2 standout
Citing Papers
Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
2013 Standout
Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
2011 Standout
Works of S. E. Smith being referenced
Barrier integrity testing of Ta using triangular voltage sweep and a novel CV-BTS test structure
2002
Author Peers
| Author | Last Decade | Papers | Cites | |||||
|---|---|---|---|---|---|---|---|---|
| S. E. Smith | 9 | 3 | 6 | 6 | 5 | 22 | ||
| A. J. Mariano | 18 | 4 | 2 | 7 | 4 | 26 | ||
| J. Lehmann | 9 | 1 | 5 | 6 | 20 | |||
| R. Kirchhoff | 11 | 5 | 4 | 22 | ||||
| J. Van Lanen | 19 | 14 | 2 | 4 | 25 | |||
| Sofia V. Forsblom | 18 | 1 | 8 | 6 | 27 | |||
| M. Jouret | 9 | 1 | 4 | 5 | 23 | |||
| S. Hervé | 6 | 1 | 5 | 1 | 5 | 24 | ||
| Rick Foster | 12 | 9 | 10 | 4 | 27 | |||
| G.T. Mulholland | 10 | 7 | 6 | 20 | ||||
| Masayuki Nakano | 4 | 4 | 7 | 5 | 22 |
All Works
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