Standout Papers

M-TEST: A test chip for MEMS material property measurement using electrostatically actuated te... 1997 2026 2006 2016 530
  1. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures (1997)
    P.M. Osterberg, S.D. Senturia Journal of Microelectromechanical Systems

Immediate Impact

1 by Nobel laureates 5 from Science/Nature 51 standout
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Works of P.M. Osterberg being referenced

M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
1997 Standout

Author Peers

Author Last Decade Papers Cites
P.M. Osterberg 563 521 212 9 688
R.A. Wickstrom 679 556 322 11 799
K.N. Andersen 481 367 187 13 678
A. Husain 483 615 186 7 752
V. T. Srikar 474 289 267 14 698
F.R. Blom 480 350 238 12 632
J.J. Sniegowski 511 388 274 21 690
D.W. Burns 557 375 341 19 719
J. O'Shea 343 329 85 13 591
William P. Eaton 541 326 403 22 712
Sudipto K. De 289 263 338 11 771

All Works

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2026