Michael Grapperhaus

Plasma-material interactions in current tokamaks and their implications for next step fusion reactors

Etching chemistry of benzocyclobutene (BCB) low-kdielectric films in F2+O2 and Cl2+O2 high density plasmas

Low dielectric constant materials for microelectronics

Fuel Source Isotopic Tailoring and Its Impact on International Thermonuclear Experimental Reactor Design, Operation, and Safety

Investigation of electron source and ion flux uniformity in high plasma density inductively coupled etching tools using two-dimensional modeling

Density profile control in a fusion reactor using pellet injection