Immediate Impact

2 standout

Citing Papers

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
2013 Standout
Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
2011 Standout
3 intermediate papers

Works of John Pellerin being referenced

A low-temperature metal-doping technique for engineering the gate electrode of replacement metal gate CMOS transistors
2003

Author Peers

Author Last Decade Papers Cites
John Pellerin 14 4 3 4 14
S. Fan 8 4 2 4 4 15
J. Mu 11 6 4 13
P. J. Gutiérrez 11 2 4 18
A. Wegmann 12 3 5 15
P. Kumari 12 3 5 12
N. Nidhi 16 1 4 4 19
X. Zhu 14 2 2 16
Ahmad Shahid Khan 10 1 4 3 14
Wilhelm Peters 8 5 4 16
Y. Bai 7 4 4 13

All Works

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Rankless by CCL
2026